Kelvin probe force microscopy: measurement data reconstruction

Machleidt, T.; Sparrer, E.; Kubertschak, Tim; Nestler, Rico; Franke, K.

doi:10.1117/12.821787

Cited by 5 publications

(3 citation statements)

References 8 publications

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“…The operator • denotes mean value. The power spectrum of V CPD is obtained using the power spectrum of V DC [17], and PSF * (u, v) is the complex conjugate of PSF(u, v). Thus, in order to reconstruct the sample CPD, the PSF of the measurement system and the noise statistics must be determined.…”

Section: The Deconvolution Methodsmentioning

confidence: 99%

Reconstruction of surface potential from Kelvin probe force microscopy images

et al. 2013

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We present an algorithm for reconstructing a sample surface potential from its Kelvin probe force microscopy (KPFM) image. The measured KPFM image is a weighted average of the surface potential underneath the tip apex due to the long-range electrostatic forces. We model the KPFM measurement by a linear shift-invariant system where the impulse response is the point spread function (PSF). By calculating the PSF of the KPFM probe (tip+cantilever) and using the measured noise statistics, we deconvolve the measured KPFM image to obtain the surface potential of the sample.The reconstruction algorithm is applied to measurements of CdS-PbS nanorods measured in amplitude modulation KPFM (AM-KPFM) and to graphene layers measured in frequency modulation KPFM (FM-KPFM). We show that in the AM-KPFM measurements the averaging effect is substantial, whereas in the FM-KPFM measurements the averaging effect is negligible.

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Section: The Deconvolution Methodsmentioning

confidence: 99%

Reconstruction of surface potential from Kelvin probe force microscopy images

et al. 2013

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“…Now we can start the potential measurement at the same position and with the information of the topography with a constant distance to the sample. In [20], we present a new method to reconstruct the KPFM measurements. In figure 12, we demonstrate the results of this method.…”

Section: Kpfm Measurements-example Multifunctional Nanoanalyticsmentioning

confidence: 99%

Multifunctional nanoanalytics and long-range scanning probe microscope using a nanopositioning and nanomeasuring machine

Vorbringer-Dorozhovets¹,

Goj²,

Machleidt³

et al. 2014

Meas. Sci. Technol.

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An interferometer-based metrological scanning probe microscope (SPM) is successfully integrated into our nanopositioning and nanomeasuring machine (NPM machine) for high-precision measurements with nanometre uncertainty over a range of 25 mm × 25 mm × 5 mm. Both devices were developed at the Institute of Process Measurement and Sensor Technology of Ilmenau University of Technology, Germany. Outstanding results were achieved for different measurement tasks. With the NPM machine, truly long-range and long-term measurements are possible. Due to the tip wear, an automatic SPM cantilever replacement is preferable. Such a tip replacement is also required for the integration of multifunctional nanoanalytics. For example, for Kelvin probe force microscopy (KPFM), the measurement of topography and surface potential with different SPM tips is necessary. For this purpose, an electromagnetic tip changer was designed. The tip changer comprises three SPM probes. In order to retrieve the previous tip positions, additional fiducial marks were developed. The repeatability of relocation is less than 10 nm. The automatic tip changer and fiducial marks are integrated into a sample holder. The tip changer in combination with fiducial marks allows scanning distances three times longer (with the same type of SPM probes) and multifunctional nanoanalytics (with different SPM probes with special properties). Sample KPFM measurements are demonstrated. The developed tip changer, including special fiducial marks, improves the performance and functionality of the NPM machine crucially.

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“…In this process, we do not intend to reconstruct the surface potential from the measured surface potential, as described in ref. 21 and 22 . The proposed approach is based on an experimental determination of the system impulse response g ( x ) in a configuration as close as possible to that used while measuring the active devices of interest, namely thin-film transistors.…”

Section: Resolution Estimate Of the Double-pass Kpfm Methodsmentioning

confidence: 99%