Laboratory based GIXRF and GEXRF spectrometers for multilayer structure investigations

Abstract

This work reports laboratory angle resolved XRF measurements with the goal of establishing laboratory techniques to obtain a more complete idea of the intralayer composition of multilayer samples.

Grazing Emission X‐Ray Fluorescence: Novel Concepts and Applications for Nano‐Analytics

“…In the 1990s, most work in the field of GEXRF was done using a high power ( kW) Rh [ 27,37,49,50 ] or Mo [ 51–54 ] anode X‐ray tube, and only later, a few publications show the feasibility of more compact low power ( kW) X‐ray tubes, [ 55,56 ] sometimes combined with polycapillary lenses. [ 38,53,57 ] Clearly, at the cost of simplicity, the high‐power tubes allow for much more flux on the sample taking full advantage of the low brilliance necessary in the excitation channel (see Figure 3 ). However, for increased lateral resolution or angular resolution in a setup with short detector distance, microbeam excitation must be used.…”

“…Nowadays, and thanks to the recent developments in detector technology, scanning‐free GEXRF setups are being realized with digital position‐sensitive detectors. [ 38,57,66,79 ] These detectors are advantageous compared to imaging plates in terms of sensitivity, signal‐to‐noise ratio, dynamic range and linearity in the intensity response. Moreover, some of this type of detectors can offer energy discrimination capabilities such that GEXRF data can be recorded at once for different elements.…”

“…In laboratory setups, where photon densities on the detector are usually lower, charge‐coupled devices (CCDs) have been successfully applied for scanning‐free GEXRF measurements. [ 38,57,71 ] Although those detectors are usually applied in an integrating mode, such that the information about X‐ray energy is lost, they can also be applied in a single photon detection mode. In this case, on each recorded CCD frame, single photons must be distinguishable.…”

“…Especially beneficial seems the concept for laboratory instrumentation, thanks to the possibility to efficiently use the full flux of laboratory sources for XRF excitation on the one hand and the increased detection efficiency and the energy discrimination capabilities of modern detectors on the other hand. [ 38,57,66 ]…”

Kossel interferences of proton-induced X-ray emission lines to study thin film waveguides

“…GEXRF measurement representing the angular resolved X-ray fluorescence technique, is sensitive to the elemental depth distributions in the nanometer range [13,14]. It can be used as a complementary characterization method of X-ray reflectometry (XRR).…”