Large‐Scale Production and Integrated Application of Micro‐Supercapacitors

Abstract

Micro‐supercapacitors, emerging as promising micro‐energy storage devices, have attracted significant attention due to their unique features. This comprehensive review focuses on two key aspects: the scalable fabrication of MSCs and their diverse applications. The review begins by elucidating the energy storage mechanisms and guiding principles for designing high‐performance devices. It subsequently explores recent advancements in scalable fabrication techniques for electrode materials and micro‐nano fabrication processes for micro‐devices. The discussion encompasses critical application domains, including multifunctional MSCs, energy storage integration, integrated power generation, and integrated applications. Despite notable progress, there are still some challenges such as large‐scale production of electrode material, well‐controlled fabrication technology, and scalable integrated manufacture. The summary concludes by emphasizing the need for future research to enhance micro‐supercapacitor performance, reduce production costs, achieve large‐scale production, and explore synergies with other energy storage technologies. This collective effort aims to propel MSCs from laboratory innovation to market viability, providing robust energy storage solutions for MEMS and portable electronics.