Cleo 2023 2023
DOI: 10.1364/cleo_si.2023.sf3j.8
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Large scale Si3N4 Integrated Circuit for High-resolution Interferometric imaging

Yichi Zhang
1
,
Rijuta Ravichandran
2
,
Yujia Zhang
3
et al.

Abstract: We design, fabricate and characterize a 4-layer 110mm×44mm Si3N4 PIC with long routing waveguides and arrayed waveguides gratings based on a wafer-scale integration process for a high-resolution interferometric imager with 1200nm~1600nm bandwidth.

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