ZnS thin films are made by laser driven chemical vapor deposition
(CVD) from a single-source precursor,
Zn(S2COCHMe2)2 under
vacuum conditions. Photofragments in the gas phase are identified
simultaneously by
luminescence spectroscopy. The laser selectively activates the
initial decomposition of the precursor and drives its
conversion to the desired materials under mild conditions. These
photolytically produced films are compared to
films made by thermal deposition from the same precursor. The
deposits from both techniques, characterized by
X-ray diffraction, Rutherford backscattering, and X-ray photoelectron
spectroscopy, are pure stoichiometric ZnS in
the hexagonal phase. Surface morphology differs in shape and
granule size. During the laser-driven CVD process,
gas-phase photochemical intermediates are identified by luminescence
spectroscopy. The luminescent photoproducts
are Zn and S2, the two elemental components of the final
material. Photofragmentation mechanisms leading to
ZnS,
the luminescent species Zn and S2, and the gaseous organic
byproducts are discussed. Further characterization of
the photofragmentation pathways is provided by the trapping of the
photoreaction products and by mass spectroscopy.