Laser direct writing and instabilities: a one-dimensional approach

Arnold, N.; Kargl, P. B.; Bäuerle, D.

doi:10.1016/0169-4332(94)00450-1

Cited by 13 publications

(10 citation statements)

References 8 publications

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“…16,22 Simulations reproduce the dependence of the period of oscillations on laser power and scanning velocity, and they also explain the shape of deposited lines.…”

Section: Discussionmentioning

confidence: 79%

“…A semiquantitative analysis of this behavior in a 1D approximation was given in Ref. 16. The arrows in Fig.…”

Section: Oscillation Of Lines With High Aspect Ratiomentioning

confidence: 98%

“…17 A similar behavior holds for stripes, as discussed for the 1D approximation. 16 This mechanism is dominating for Si deposition.…”

Section: Oscillation Of Lines With High Aspect Ratiomentioning

confidence: 99%

“…This behavior agrees quite well with that observed experimentally. 8,16 An additional note seems to be appropriate. The accuracy of the numerical simulations is determined by the accuracy to which the thermophysical parameters and the real dependence of the absorptivity on temperature are known.…”

Section: Hysteresis In the Transition From Line-to Fiber-type Growthmentioning

confidence: 99%

“…12,13 Self-consistent treatments of laser direct writing, which combine temperature and growth rate calculations, have been performed numerically 14 and on the basis of a simplified one-dimensional ͑1D͒ model. 15,16 In Ref. 17, we proposed a fast algorithm for the calculation of temperature distributions within arbitrarily shaped deposits.…”

Section: Introductionmentioning

confidence: 99%

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Modeling of pyrolytic laser direct writing: Noncoherent structures and instabilities

Arnold

Kargl

Bäuerle

1997

Journal of Applied Physics

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Fabrication of a low-operating voltage diamond thin film metal-semiconductor-metal photodetector by laser writing lithography Three-dimensional simulations of pyrolytic laser direct writing from gas-phase precursors are presented. They are based on a fast method for the calculation of temperature distributions induced by an energy beam in deposits of arbitrary shape. Analytical approximations, fast Fourier transform, and the multigrid technique are combined in the algorithm. Temperature dependences of the absorptivities and heat conductivities of the deposit and the substrate have been taken into account. Self-consistent modeling of the growth process allows one to explain oscillations in the height and width of lines caused by the feedback between the shape of the deposit, the temperature distribution, and the growth rate. For the deposition of W from an admixture of WCl 6 ϩH 2 and a-SiO 2 substrates, the oscillations originate from a sharp increase in the absorptivity of the deposit with temperature. With the deposition of Si from SiH 4 , or C from CH 4 , C 2 H 2 , and C 2 H 4 , onto a-SiO 2 , the oscillations are related to the large ratio of height/width of the deposit and the increase in temperature on its upper surface. This increase also explains the transition from line-type to fiber-type growth. The hysteresis of this transition with respect to laser power and scanning velocity is explained as well. The same algorithm can be used in the modeling of pyrolytic etching and e-beam microprocessing when the feedback between the temperature distributions and changes in the processing geometry is important.

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“…16,22 Simulations reproduce the dependence of the period of oscillations on laser power and scanning velocity, and they also explain the shape of deposited lines.…”

Section: Discussionmentioning

confidence: 79%

“…A semiquantitative analysis of this behavior in a 1D approximation was given in Ref. 16. The arrows in Fig.…”

Section: Oscillation Of Lines With High Aspect Ratiomentioning

confidence: 98%

“…17 A similar behavior holds for stripes, as discussed for the 1D approximation. 16 This mechanism is dominating for Si deposition.…”

Section: Oscillation Of Lines With High Aspect Ratiomentioning

confidence: 99%

Section: Hysteresis In the Transition From Line-to Fiber-type Growthmentioning

confidence: 99%