Laser irradiation of α-SiC ceramics

Власова, М.; Aguilar, P.A. Márquez; Reséndiz-González, M.C.; Kakazey, M.; Guzmán, Julio; Быков, А. И.; Stetsenko, V.; Томила, T. В.; Ragulya, A. V.

doi:10.1016/j.ceramint.2008.11.019

Cited by 5 publications

(1 citation statement)

References 15 publications

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“…Conventional mechanical machining methods could cause severe damages, such as chipping, cracking, and mechanical stress in SiC. Recent development in short wavelength, short pulse width, and high peak power lasers has prompted many researchers to study the use of laser for micromachining of SiC 3–11 . Laser machining is a noncontact process and thus, it does not exert any mechanical force on a workpiece resulting in a relatively higher process yield and productivity.…”

Section: Introductionmentioning

confidence: 99%

Solvent-Assisted Laser Drilling of Silicon Carbide

Wee

Khoong

Tan

et al. 2010

International Journal of Applied Ceramic Technology

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Laser drilling of single crystalline silicon carbide (SiC) wafer in air, under water, and under methanol with a 355 nm wavelength laser is investigated and compared. Among these different media, laser drilling of SiC under a solvent, methanol, is found to produce holes with a relatively cleaner and smoother surface. Ablated particle redeposition at the entrance and exit of the holes is minimized. Minimum oxide (i.e., silicon dioxide) or heat-affected zones are observed and the surface finish inside the holes is much smoother and more uniform as compared with those drilled in air and under water. The improvement of drilling quality can be attributed to the relatively lower boiling temperature and better wettability of the solvents, which enhance the effects of cooling (thermal damage free) and ablated particle cleaning during laser drilling. It is found that the quality of laser drilling of SiC varied with the thickness of solvent layer, that is, water and methanol. A solvent layer of 500 mm is suggested to be used for the enhancement of laser ablation rate and quality.

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Section: Introductionmentioning

confidence: 99%

Solvent-Assisted Laser Drilling of Silicon Carbide

Wee

Khoong

Tan

et al. 2010

International Journal of Applied Ceramic Technology

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Influence of surface morphology and processing parameters on polishing of silicon carbide ceramics using femtosecond laser pulses

Zheng

Mei

Jiang

et al. 2023

Surfaces and Interfaces

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The damage effect of weld seam and groove area of titanium alloy with ceramic laser resistant coating

et al. 2021

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In order to explore the effect of weld area and groove structure on the damage effect of laser irradiation on titanium alloy and ceramic coating, the experiment of continuous laser irradiation on welding seam and groove area of titanium alloy was studied, while the surfaces of the specimens were coated with or without anti-laser ceramic material. The following conclusions were obtained: the ceramic coating can protect the titanium alloy substrate from the damage of high power laser effectively; the laser resistance of ceramic coating on the welding seam area is weakened, but it still protects the titanium alloy effectively; the damage of laser on the edge and the corner structure of titanium alloy with groove structure is aggravated with the increasing of laser power density, and under the same laser density, the damage inside the groove is less than that outside, while that of corner is less than edge. Micromorphology results show that the ceramic coating undergoes a series of physical and chemical changes and phase transformation to absorb a large amount of thermal energy converted from luminous energy, which has a protective effect on the titanium alloy.

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Laser irradiation of α-SiC ceramics

Cited by 5 publications

References 15 publications

Solvent-Assisted Laser Drilling of Silicon Carbide

Solvent-Assisted Laser Drilling of Silicon Carbide

Influence of surface morphology and processing parameters on polishing of silicon carbide ceramics using femtosecond laser pulses

The damage effect of weld seam and groove area of titanium alloy with ceramic laser resistant coating

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