Lateral silicon field emission devices using electron beam lithography

Shin, Hyungcheol; Yang, Sun-A; Hwang, Taekeun; Han, Sangyeon; Lee, Jong-Ho; Lee, Yjong Duk

doi:10.1109/imnc.1999.797513

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference

DOI: 10.1109/imnc.1999.797513

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Lateral silicon field emission devices using electron beam lithography

Hyungcheol Shin¹,

Sun-A Yang²,

Taekeun Hwang³

et al.

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Lateral silicon field emission devices using electron beam lithography

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References 5 publications

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