2010
DOI: 10.1021/nn101896a
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Layer-by-Layer Transfer of Multiple, Large Area Sheets of Graphene Grown in Multilayer Stacks on a Single SiC Wafer

Abstract: Here we report a technique for transferring graphene layers, one by one, from a multilayer deposit formed by epitaxial growth on the Si-terminated face of a 6H-SiC substrate. The procedure uses a bilayer film of palladium/polyimide deposited onto the graphene coated SiC, which is then mechanically peeled away and placed on a target substrate. Orthogonal etching of the palladium and polyimide leaves isolated sheets of graphene with sizes of square centimeters. Repeating these steps transfers additional sheets f… Show more

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Cited by 66 publications
(53 citation statements)
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“…2d-f). 64 A similar exfoliation transfer using thermal release tape was developed by Caldwell et al 65 Holes approximately 10 mm in size were created during the transfer but the graphene showed a relatively small Raman D peak. Unlike the Raman studies, however, it was apparent from the comparison of before and after measurements of carrier density that the electrical properties were significantly decreased because of the holes and damage; the average mobility dropped from 1485 cm 2 V À1 s À1 to 201 cm 2 V À1 s À1 after the transfer.…”
Section: Sukang Baementioning
confidence: 99%
“…2d-f). 64 A similar exfoliation transfer using thermal release tape was developed by Caldwell et al 65 Holes approximately 10 mm in size were created during the transfer but the graphene showed a relatively small Raman D peak. Unlike the Raman studies, however, it was apparent from the comparison of before and after measurements of carrier density that the electrical properties were significantly decreased because of the holes and damage; the average mobility dropped from 1485 cm 2 V À1 s À1 to 201 cm 2 V À1 s À1 after the transfer.…”
Section: Sukang Baementioning
confidence: 99%
“…The two-layer model was used to determine the thickness of graphene sheets grown epitaxially in multilayer stacks on SiC(0001) that were transferred layerby-layer to SiO 2 /Si substrates [28]. Figure 3.16 shows the high resolution C 1s spectra collected at one emission angle from the as-grown surface and the surface following the first and second transfer.…”
Section: Angle-resolved Xps and Thickness Measurementmentioning
confidence: 99%
“…Recently, in order to overcome such a problem, a layer-bylayer transfer method was developed [30]. This enhancement was made possible by replacing Au, in the process mentioned above, with Pd.…”
Section: Chemical Exfoliationmentioning
confidence: 99%