2014 IEEE International Frequency Control Symposium (FCS) 2014
DOI: 10.1109/fcs.2014.6859873
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Length-extension LGS microresonators for FM-AFM: Microfabrication and shear effects sensitivity

Abstract: To cite this version:Thérèse Leblois, Fabien Henrot, Etienne Herth. Length-extension LGS microresonators for FM-AFM: microfabrication and shear effects sensitivity. Conférence internationale avec proceeding : poster 2014 IEEE International Frequency Control Symp.. 2014.

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