Liquid assisted plasma enhanced chemical vapour deposition with a non-thermal plasma jet at atmospheric pressure

Schäfer, Jan; Fricke, Katja; Mika, Filip; Pokorná, Zuzana; Zajı́čková, Lenka; Foest, Rüdiger

doi:10.1016/j.tsf.2016.09.022

Cited by 34 publications

(29 citation statements)

References 31 publications

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“…The plasma‐based coating process causes this main Si–O–Si peak of the pure precursors to be shifted from 1,050 cm −1 to higher wavenumbers of 1,060–1,085 cm −1 and it was observed that the Si bulk –H x peak between 2,110 and 2,260 cm −1 had completely disappeared. The silica formation process is clearly evident from the spectra leading to the loss of carbon groups and increase in SiO x stoichiometry, [ 30 ] which was also validated by the XPS data (Figure S3).…”

Section: Resultssupporting

confidence: 54%

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Plasma‐assisted gas‐phase synthesis and in‐line coating of silicon nanoparticles

Dasgupta

Fortugno

Wiggers

2020

Plasma Processes & Polymers

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This study investigates the feasibility of plasma-supported in-line functionalization of silicon nanoparticles (NPs) in an atmospheric pressure gas-phase reactor. The approach utilizes the synthesis of core silicon NPs and their subsequent coating downstream of the particle formation zone. In-line coating is accomplished with a cylindrical coating nozzle to achieve homogenous mixing of coating precursor vapors with in-coming NPs. Multiple siloxanes were tested for their coating suitability and their ability towards coating homogeneity. It was

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Section: Resultssupporting

confidence: 54%

“…[ 29 ] Despite these differences, all precursors exhibit a strong and characteristic Si–CH 3 and Si–O–CH 2 – mode, respectively, appearing between 1,250 and 1,260 cm −1 that can be used as a measure for the decomposition and oxidation of the siloxanes. [ 30 ]…”

Section: Resultsmentioning

confidence: 99%

Plasma‐assisted gas‐phase synthesis and in‐line coating of silicon nanoparticles

Dasgupta

Fortugno

Wiggers

2020

Plasma Processes & Polymers

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“…As can be clearly seen in Figure a, a dramatic change in the color of the PA12 powder was observed as the pristine PA12 powder is white and becomes light brown after a 1 h exposure, and a darker brown after 2 h. The treated and nontreated powders were also pressed into solid discs with the disc surface displaying a uniform color which reveals that only fewer powder particles were not well‐exposed (see Figure b). Activated atoms and molecules in the electric field during plasma exposure react with the modified surface, creating new oxygenated groups and new chemical functionalities …”

Section: Resultsmentioning

confidence: 99%

“…Plasma‐ a reactive medium containing free electrons, excited and ionized atoms and molecules, radicals, and metastables and VIS‐UV radiation is widely applied also for chemically modification of polymer surfaces, e.g., ultrafine cleaning, functionalization, etching, or thin film deposition . Atmospheric pressure plasma jets are used to improve the wettability and adhesion, as is low pressure plasma .…”

Section: Introductionmentioning

confidence: 99%

Surface modification of the laser sintering standard powder polyamide 12 by plasma treatments

Almansoori

Masters

Abrams

et al. 2018

Plasma Processes & Polymers

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Polyamide 12 (PA12) powder was exposed for up to 3 h to low pressure air plasma treatment (LP‐PT) and several minutes by two different atmospheric pressure plasma jets (APPJ) i.e., kINPen (K‐APPJ) and Hairline (H‐APPJ). The chemical and physical changes resulting from LP‐PT were observed by a combination of Scanning Electron Microscopy (SEM), Hot Stage Microscopy (HSM) and Fourier transform infrared spectroscopy (FTIR), which demonstrated significant changes between the plasma treated and untreated PA12 powders. PA12 exposed to LP‐PT showed an increase in wettability, was relatively porous, and possessed a higher density, which resulted from the surface functionalization and materials removal during the plasma exposure. However, it showed poor melt behavior under heating conditions typical for Laser Sintering. In contrast, brief PJ treatments demonstrated similar changes in porosity, but crucially, retained the favorable melt characteristics of PA12 powder.

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“…The application of nt-APPJs for homogeneous surface treatment, such as activation of polymer surfaces, cleaning and thin film deposition [11] is still hampered by the presence of steep local gradients of the plasma parameters due to the chaotic (erratic) nature of the filamented discharge channels (plasma filaments). Their formation in a discharge gap is usually a random function of time and an averaging of spatial filament distribution can be only achieved considering longer time intervals.…”

Section: Introductionmentioning

confidence: 99%

Searching for order in atmospheric pressure plasma jets

Schäfer

Sigeneger

Šperka

et al. 2017

Plasma Phys. Control. Fusion

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The self-organized discharge behaviour occurring in a non-thermal radio-frequency plasma jet in rare gases at atmospheric pressure was investigated. The frequency of the azimuthal rotation of filaments in the active plasma volume and their inclination were measured along with the gas temperature under varying discharge conditions. The gas flow and heating were described theoretically by a three-dimensional hydrodynamic model. The rotation frequencies obtained by both methods qualitatively agree. The results demonstrate that the plasma filaments forming an inclination angle α with the axial gas velocity u z are forced to a transversal movement with the velocity u u tan z a = f ( ) · , which is oriented in the inclination direction. Variations of u f in the model reveal that the observed dynamics minimizes the energy loss due to convective heat transfer by the gas flow. The control of the self-organization regime motivates the application of the plasma jet for precise and reproducible material processing.

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Liquid assisted plasma enhanced chemical vapour deposition with a non-thermal plasma jet at atmospheric pressure

Cited by 34 publications

References 31 publications

Plasma‐assisted gas‐phase synthesis and in‐line coating of silicon nanoparticles

Plasma‐assisted gas‐phase synthesis and in‐line coating of silicon nanoparticles

Surface modification of the laser sintering standard powder polyamide 12 by plasma treatments

Searching for order in atmospheric pressure plasma jets

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