34th European Mask and Lithography Conference 2018
DOI: 10.1117/12.2326784
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Lithography technology and trends for More than Moore devices: advanced packaging and MEMS devices

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“…Moore’s Law, known as the “gold standard” of the chip industry, appears to have reached a “bottleneck” stage as a result of the ongoing advancements in integrated circuit technology [ 1 , 2 , 3 , 4 ]. Going Beyond Moore’s Law has been suggested in this context [ 5 , 6 , 7 ], and the industry has given system-in-package (SiP) technology much attention. SiP technology combines numerous active devices that are based on bare chips with various passive devices that are all combined into a single package.…”
Section: Introductionmentioning
confidence: 99%
“…Moore’s Law, known as the “gold standard” of the chip industry, appears to have reached a “bottleneck” stage as a result of the ongoing advancements in integrated circuit technology [ 1 , 2 , 3 , 4 ]. Going Beyond Moore’s Law has been suggested in this context [ 5 , 6 , 7 ], and the industry has given system-in-package (SiP) technology much attention. SiP technology combines numerous active devices that are based on bare chips with various passive devices that are all combined into a single package.…”
Section: Introductionmentioning
confidence: 99%