Extended Abstracts of the 2005 International Conference on Solid State Devices and Materials 2005
DOI: 10.7567/ssdm.2005.a-5-2
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Local Current Leakage Characterization in La2O3-Al2O3 Composite Films by Conductive Atomic Force Microscopy

Akiyoshi Seko1,
Toshifumi Sago2,
Mitsuo Sakashita3
et al.
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