Local Structural Modifications in Metallic Micropillars Induced by Plasma Focused Ion Beam Processing
Kritika Singh,
Surya Snata Rout,
Christina Krywka
et al.
Abstract:A focused ion beam scanning electron microscope (FIB-SEM) is a powerful tool that is routinely used for scale imaging from the micro- to nanometer scales, micromachining, prototyping, and metrology. In spite of the significant capabilities of a FIB-SEM, there are inherent artefacts (e.g., structural defects, chemical interactions and phase changes, ion implantation, and material redeposition) that are produced due to the interaction of Ga+ or other types of ions (e.g., Xe+, Ar+, O+, etc.) with the sample. In t… Show more
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