Copper oxide, silicon carbide and alumina Á/zirconia nanopowders have been produced by laser ablation in different atmospheres. Particle morphology, phase transformation and powder composition were investigated by X-ray diffraction, transmission electron microscopy, high resolution electron microscopy, and infrared spectroscopy. Targets used for producing the corresponding nanopowders usually melt, evaporate, decompose and oxidize during laser ablation, which lead to phase transformations and composition changes. A model has been proposed to explain the formation mechanism of nanoparticles, especially the nanoparticles embedded in amorphous matrices. #