Long-wavelength MEMS tunable vertical-cavity surface-emitting lasers with high sidemode suppression

Kögel, Benjamin; Maute, M.; Halbritter, H.; Riemenschneider, Frank; Böhm, G.; Amann, Markus‐Christian; Meißner, P.

doi:10.1088/1464-4258/8/7/s13

Cited by 20 publications

(11 citation statements)

References 22 publications

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“…The tunable VCSEL is a hybrid two-chip assembly of a micro-electro-mechanical system with concave AlGaAs/ GaAs mirror membrane and an InP-based semiconductor cavity with a tunnel junction aperture [13,14]. The MEMS technology is very promising in respect to the achievement of very good spectral properties.…”

Section: Laser Design and Fabricationmentioning

confidence: 99%

“…Another type of commercially available system in the optical telecommunication spectral range (S-, C-, and L-band), which is worth to mention, is made up of an array of several (typ. [8][9][10][11][12][13][14][15][16]) slightly detuned DFB laser chips. The lasers are coupled into an optical fiber using a MEMS mirror [11] or a passive optical combiner [12].…”

Section: Introductionmentioning

confidence: 99%

“…The potential advantages of the reported technology comprise a very compact size incorporable into a TO-package as commonly used for standard laser diodes, a tuning range of several tens of nanometers provided by an electro-thermal or electrostatic actuation of the membrane and a fast tuning over the entire range at millisecond timescales. A continuous static tuning range scaling up to 60 nm has been previously demonstrated for MEMS-VCSELs in the optical telecommunications Cband [2] with a 3-dB tuning bandwidth of 180 Hz [3,13]. To achieve such a large tunability, the device is designed to operate in a so-called extended-cavity configuration, in which the top facet of the half-VCSEL is anti-reflectioncoated to prevent a residual reflection at the semiconductorair interface so as to deal with a single optical cavity between the bottom distributed Bragg reflector (DBR) and the MEMS mirror.…”

Section: Introductionmentioning

confidence: 99%

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Spectral and modulation properties of a largely tunable MEMS-VCSEL in view of gas phase spectroscopy applications

Schilt¹,

Zogal

Kögel

et al. 2010

Appl. Phys. B

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An extensive characterization of the spectral properties of a largely tunable laser in the 1.56-µm spectral range is reported. This device combines a vertical-cavity surface-emitting laser (VCSEL) with a micro-machined (MEMS) Bragg mirror in a very compact arrangement. The large tunability obtained by an electro-thermal actuation of the MEMS mirror makes this device very attractive for high-resolution spectroscopy. Relevant laser parameters for the implementation of wavelength modulation spectroscopy techniques in gas sensing, such as tuning and modulation properties, are presented. A preliminary gas spectroscopy experiment performed with this laser is also shown.

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Section: Laser Design and Fabricationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Spectral and modulation properties of a largely tunable MEMS-VCSEL in view of gas phase spectroscopy applications

Schilt¹,

Zogal

Kögel

et al. 2010

Appl. Phys. B

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“…That is why this filter belongs to the micro opto electro mechanical system (MOEMS). MOEMSdevices like tunable filters [3][4][5] , photodiodes 6 or lasers 1,7,8 that are operating at a wavelength around 1.5µm are interesting for the applications in wavelength division multiplexing (WDM)-optical communication systems 9 , in gas spectroscopy 2 and in fiber-Bragg-grating measurements. 10 The main reason for the interest is the wide continuous tuning range of the wavelength.…”

Section: Introductionmentioning

confidence: 99%

Bulk- micromachined dielectric tunable optical filter realized with inductively coupled plasma chemical vapour deposition

et al. 2008

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We present the characterization of silicon oxide (SiO x ) and silicon nitride (SiN x ) films deposited by inductively coupled plasma chemical vapour deposition (ICP-CVD) at low temperature (< 100 • C). A tunable optical FabryPérot (FP) -filter operating at a wavelength around 1.5µm is realized. It is hybridly assembled with two dielectric distributed Bragg reflectors (DBR). One of the DBR-mirrors is intentionally curved using the intrinsic stress inside the films. Our aim is the development of a tunable surface micromachined VCSEL with a curved dielectric mirror. Therefore ICP-CVD with a low deposition temperature is used for SiO x and SiN x films. As a first step the realization of a tunable bulk-mircomachined optical FP-filter is presented. The refractive index, deposition rate, stress and etching rate in buffered hydrofluoric acid (BHF) of thin dielectric films (<500 nm) in dependence on deposition temperature and on gas flow ratio are investigated. The knowledge of the deposition characteristics of the dielectric films is used to realize DBRs with a given curvature that are applied to electrothermally actuated, optical tunable FP-filters. The presented filter has a free spectral range of 29 nm, an insertion loss of 10 dB and a full width half maximum of 0.16 nm.

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“…The examples include vertical-cavity surface-emitting lasers (VCSELs) with an optimized microelectromechanical system (MEMS) tuning structure [8], thermally widely tunable laser diodes with distributed feedback [9], sampled grating distributed bragg reflector (SGDBR) laser [10], and external cavity lasers (ECL) [11,12], and so on.…”

Section: Introductionmentioning

confidence: 99%

Tunable ring laser based on a semiconductor optical amplifier at 1300 nm using a simple wavelength selection filter

Jeon

Kim

Song

et al. 2008

Micro & Optical Tech Letters

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A simple, compact, and low cost tunable ring laser with a commercial semiconductor optical amplifier (SOA) was demonstrated. The tunable ring laser is based on an external wavelength filter cavity that is analogous with the Littman configuration with a diffraction grating, a mirror, and a simple slit. The unique structural advantage of this new system is that the slit is displaced to select a desired wavelength instead of tilting the mirror as in the Littman configuration. This allows easy control over the selected wavelength by the translating action of the slit. The full width half maximum (FWHM) wavelength turning range is 45 nm, and the wavelength resolution is about 2 pm. The demonstrated tunable ring laser has 2 mW output power. The side mode suppression ratios is 70-73 dB.

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Long-wavelength MEMS tunable vertical-cavity surface-emitting lasers with high sidemode suppression

Cited by 20 publications

References 22 publications

Spectral and modulation properties of a largely tunable MEMS-VCSEL in view of gas phase spectroscopy applications

Spectral and modulation properties of a largely tunable MEMS-VCSEL in view of gas phase spectroscopy applications

Bulk- micromachined dielectric tunable optical filter realized with inductively coupled plasma chemical vapour deposition

Tunable ring laser based on a semiconductor optical amplifier at 1300 nm using a simple wavelength selection filter

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