Low cost sol gel derived silica-titania waveguide films – Characterization

Zięba, Magdalena; Tyszkiewicz, Cuma; Wojtasik, Katarzyna; Pavłov, Krystian; Chaber, Paweł; Gondek, Ewa; Nizioł, Jacek; Rogoziński, Roman; Kielan, Paweł; Karasiński, Paweł

doi:10.1016/j.optlastec.2023.110339

Cited by 1 publication

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“…The most common precursors for this process are silicon alkoxides, which in aqueous silicate systems under acidic or basic conditions undergo hydrolysis and condensation reactions, forming three-dimensional gel networks or sols. This type of synthesis is also used for materials based on precursors of titania, e.g., silica–titania and titania layers. However, on the contrary to the silicon alkoxides, the reactivity toward hydrolysis reaction of the metal alkoxides is strongly increased; thus, their reactivity is often moderated by chemical modifications using compounds containing, e.g., β-diketonate groups. ,, …”

Section: Experimental Methodsmentioning

confidence: 99%

Focused Electron Beam Micro- and Nanopatterning of Thin Films Derived from Sol–Gels Based on TiO₂ Precursors for Planar Photonics

Rola,

Duda,

Gorantla

et al. 2024

ACS Appl. Nano Mater.

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Titanium dioxide (TiO2) is an attractive material for planar photonics; thus, the fabrication of TiO2 micro- and nanostructures has been a topic of many reports in recent years. In this work, we have presented systematic studies on focused electron beam (e-beam) micro- and nanopatterning of sol–gel-derived layers based on different alkoxide precursors of TiO2 stabilized with benzoylacetone (BzAc). The e-beam method is a flexible high-resolution technique, whereas the use of the sol–gel process, which utilizes precursors of titania in the condensed phase, enables lower electron doses in comparison to gas-phase precursors from injection systems. As the sol–gel process is relatively complex, we analyzed the effect of different process parameters on the patterning. It has given us insight into the phenomena related to the e-beam irradiation of sol–gel-derived layers based on titanium alkoxide precursors. We have examined patterned films using scanning and transmission electron microscopy, energy-dispersive X-ray spectroscopy, ellipsometry, and profilometry. We have shown that the role of the alkoxy chain length in the processing of sol–gel-derived layers is more significant in the case of alcohol solvents than titania precursors. Moreover, high-resolution periodic nanostructures with steep sidewalls and high aspect ratio can be patterned, especially when the molar ratio of BzAc to titanium alkoxide in sol is increased from 1:1 to 2:1. Although the patterned films have a high concentration of carbon, it can be completely removed by annealing at 500 °C. This heat treatment leads to an increase in the refractive index from 1.59 to 2.11 (at the wavelength of 632.8 nm), but the patterned film turns polycrystalline in the nanoscale, showing the anatase phase of TiO2. The obtained results indicate that the investigated patterning method can be potentially applied for direct writing of planar photonic components with nanoscale features such as grating couplers for sensors. Nevertheless, the fabrication of high-quality TiO2 structures still needs optimization.

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Section: Experimental Methodsmentioning

confidence: 99%

Focused Electron Beam Micro- and Nanopatterning of Thin Films Derived from Sol–Gels Based on TiO₂ Precursors for Planar Photonics

Rola,

Duda,

Gorantla

et al. 2024

ACS Appl. Nano Mater.

View full text Add to dashboard Cite

show abstract

Low cost sol gel derived silica-titania waveguide films – Characterization

Cited by 1 publication

References 47 publications

Focused Electron Beam Micro- and Nanopatterning of Thin Films Derived from Sol–Gels Based on TiO₂ Precursors for Planar Photonics

Focused Electron Beam Micro- and Nanopatterning of Thin Films Derived from Sol–Gels Based on TiO₂ Precursors for Planar Photonics

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Low cost sol gel derived silica-titania waveguide films – Characterization

Cited by 1 publication

References 47 publications

Focused Electron Beam Micro- and Nanopatterning of Thin Films Derived from Sol–Gels Based on TiO2 Precursors for Planar Photonics

Focused Electron Beam Micro- and Nanopatterning of Thin Films Derived from Sol–Gels Based on TiO2 Precursors for Planar Photonics

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Product

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About

Focused Electron Beam Micro- and Nanopatterning of Thin Films Derived from Sol–Gels Based on TiO₂ Precursors for Planar Photonics

Focused Electron Beam Micro- and Nanopatterning of Thin Films Derived from Sol–Gels Based on TiO₂ Precursors for Planar Photonics