2021
DOI: 10.1007/s00542-020-05206-9
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Low cost SU-8 lift-off process to fabricate a gold/glass microelectrodes array for culturing applications

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Cited by 3 publications
(1 citation statement)
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“…(4) The microfabrication technology and materials of MEAs are being optimized to achieve a lower cost and faster preparation. In addition, the use of SU-8 to replace traditional SiO 2 and Si 3 N 4 insulation layers [64] and 3D printing technology to easily make MEAs (Figure 3D) [65] are pioneering attempts in this field.…”
Section: Development Direction Of In Vitro Measmentioning
confidence: 99%
“…(4) The microfabrication technology and materials of MEAs are being optimized to achieve a lower cost and faster preparation. In addition, the use of SU-8 to replace traditional SiO 2 and Si 3 N 4 insulation layers [64] and 3D printing technology to easily make MEAs (Figure 3D) [65] are pioneering attempts in this field.…”
Section: Development Direction Of In Vitro Measmentioning
confidence: 99%