Low-energy electron scattering by C2HF5

Abstract

We report elastic and electronically inelastic cross sections for low-energy electron scattering by pentafluoroethane, C 2 HF 5 . Our calculations were performed using the Schwinger multichannel method. For elastic scattering, we calculated integral, differential, and momentum transfer cross sections for energies from 5 to 50 eV. In the inelastic case, we obtained integral and differential cross sections for electron-impact excitation of the 1 1,3AЈ and 2 1,3 AЈ excited states at the three-channel level of approximation. At higher energies, the elastic differential cross sections are quite similar to existing theoretical results for C 2 F 6 . Limited electronic-structure calculations were carried out to explore the dissociation behavior of the excited states.

Integral Electron Scattering Cross Sections from N2O for Impact Energies Ranging from 1 to 1000 eV

“…Taking our TCS values as reference data, we find that the calculation of Winstead and McKoy, 24 using the Swinger multichannel (SMC) method, shows an excellent agreement on the position of this resonance with that experimentally observed. McKoy's results were extended by Bettega et al 25 up to 50 eV, maintaining the concordance with the present TCS. However, R-matrix and SMC calculations from Vinodkumar and Barot 29 and Michelin et al 26 give IECS values higher in magnitude than the present TCS, in contradiction with our reference data.…”

“…Other R-matrix calculations from Morgan et al, 30 Tennyson and Morgan 28 and Sarpal et al 27 agree with our reference TCS data but tend to place the energy position of the 2 Π resonance below the experimental result. For electron energies from 20 to 50 eV, our calculated IECSs provide reliable data, within 10%, and show a good agreement with the calculations of Winstead and McKoy 24 and Bettega et al, 25 within the mentioned uncertainty limits. The recommended IECS values of Song et al 13 are mainly based on experimental data and, considering their quoted uncertainty, agree well, in general with the most representative calculations (see ref 13 for details).…”

“…Integral electron scattering cross sections from N 2 O.  , present combined experimental and theoretical total electron scattering cross sections;  , present calculated elastic scattering cross section (IAM-SCAR + I method); red line, calculated elastic cross sections (SMC method) of ref ; blue line, elastic scattering SMC calculations from ref ; purple dashed line, elastic scattering SMC calculations from ref ; light blue line, elastic scattering R-matrix calculations from ref ; green line, elastic scattering R-matrix calculations from ref ; red dashed line, elastic scattering R-matrix calculations from ref ; red circle, elastic scattering cross sections recommended in ref .…”

Developing Cross Section Sets for Fluorocarbon Etchants

“…We have also studied a number of other fluoro-and hydrofluorocarbons, including C 2 HF 5 (pentafluoroethane) [12], C 2 F 6 (hexafluoroethane), C 6 F 6 (hexafluorobenzene), 1,3-C 4 F 6 (1,3-hexafluorobutadiene), and c-C 5 F g (octafluorocylopentene), as well as radicals such as CHF and CF 2 that may be present in plasmas at significant concentrations; however, the three examples we have chosen are fairly representative and are also of some current interest in plasma etching applications.…”

Optical potentialmethod for electron scattering by molecule

“…Тобто роль ін-терференційного (непрямого) доданку до-статньо велика. Переріз з роботи [14], роз-рахований у стат-обмінному наближенні, проходить близько до перерізу e+P розсію-вання [11], тобто він є достатньо невели-ким. У роботі [3] чисельно показано, що з ростом енергії зіткнення (починаючи з 100 еВ) для перерізів передачi імпульсу справе-дливою стає рівність ) ( ) ( …”