2011 16th International Solid-State Sensors, Actuators and Microsystems Conference 2011
DOI: 10.1109/transducers.2011.5969231
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Low-leakage gas sample-injection system for gas chromatography in harsh environments

Abstract: We report on a microinjector for gas chromatography, whose specificity is to be able to sustain the harsh environment of natural gas. This device integrates six low-leak microvalves made from polyetheretherketone membranes on silicon substrate. We present the design, operation principle, and results of intrinsic characterizations of the microinjector, as well as its behavior in a compact gas chromatograph. The microinjector dimensions are 7 mm × 3 mm × 1.2 mm. Precise injection of 250 nL sample volumes is achi… Show more

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