Low-loss planar optical waveguides based on plasma deposited silicon oxycarbide

Baudzus, Lars; Krummrich, Peter M.

doi:10.1364/ome.9.002797

Cited by 3 publications

(2 citation statements)

References 19 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…[144] This property has been used to develop low-loss waveguides in the near-infrared region. [145,146] Conversely, in recent years, the PL study on SiO x C y thin films has increased prominence due to its wide range of intensive emission in the visible spectra in recent years. [29,[120][121][122][123] Table 3 summarizes different methods for obtaining Si QDs embedded in the carbide and oxycarbide matrices and some of their related properties.…”

Section: Emission Mechanisms Of Si Nanostructures In the Carbide-rela...mentioning

confidence: 99%

Silicon Compound Nanomaterials: Exploring Emission Mechanisms and Photobiological Applications

Dutt,

Salinas,

Martínez-Tolibia

et al. 2023

Advanced Photonics Research

View full text Add to dashboard Cite

After the first visible photoluminescence (PL) from porous silicon (pSi), continuous efforts are made to fabricate Si‐based compound nanomaterials embedded in matrices such as oxide, nitride, and carbide to improve optical performance and industrial acceptability. These nanomaterials’ functional and desired properties (nanoparticles and quantum dots embedded in matrices) can vary significantly when embedded in technologically relevant matrices. However, exploring the exact emission mechanisms is one of the remaining challenges from the past few decades. To cover this gap, this review discusses the morphological and optoelectronic properties of Si‐based compound nanomaterials and their correlation with the quantum confinement effect and different surface states to find precise emission mechanisms. One of the biggest challenges of using silicon nanomaterials in the biological sector is the development of sensitive materials of low/acceptable toxicity for identifying target analytes either inside/outside the biological platforms. In this scenario, silicon‐based compound matrices can offer different characteristics and advantages depending on their size configurations and PL emission mechanisms. On the other hand, a proper understanding of these multifaceted silicon nanomaterials’ optical properties (emission mechanisms) can be exploited for pathogen detection and in situ applications in cells and tissues, embarking on a new era of bioimaging technology.

show abstract

Section: Emission Mechanisms Of Si Nanostructures In the Carbide-rela...mentioning

confidence: 99%

Silicon Compound Nanomaterials: Exploring Emission Mechanisms and Photobiological Applications

Dutt,

Salinas,

Martínez-Tolibia

et al. 2023

Advanced Photonics Research

View full text Add to dashboard Cite

show abstract

“…Hence, the silicon platform is not attractive to small and medium-sized enterprises. For this reason, many research groups are trying to develop other, low-cost material platforms for applications in integrated optics technology [ 38 , 39 , 40 , 41 ], including chemical/biochemical evanescent wave sensors, which can be used in the Vis-NIR spectral range. Such research was also undertaken by our research group, and the results are presented in this article.…”

Section: Introductionmentioning

confidence: 99%

Sol-Gel Derived Silica-Titania Waveguide Films for Applications in Evanescent Wave Sensors—Comprehensive Study

et al. 2022

View full text Add to dashboard Cite

Composite silica-titania waveguide films of refractive index ca. 1.8 are fabricated on glass substrates using a sol-gel method and dip-coating technique. Tetraethyl orthosilicate and tetraethyl orthotitanate with molar ratio 1:1 are precursors. Fabricated waveguides are annealed at 500 °C for 60 min. Their optical properties are studied using ellipsometry and UV-Vis spectrophotometry. Optical losses are determined using the streak method. The material structure and chemical composition, of the silica-titania films are analyzed using transmission electron microscopy (TEM) and electron dispersive spectroscopy (EDS), respectively. The surface morphology was investigated using atomic force microscopy (AFM) and scanning electron microscopy (SEM) methods. The results presented in this work show that the waveguide films are amorphous, and their parameters are stable for over a 13 years. The optical losses depend on their thickness and light polarization. Their lowest values are less than 0.06 dB cm−1. The paper presents the results of theoretical analysis of scattering losses on nanocrystals and pores in the bulk and interfaces of the waveguide film. These results combined with experimental data clearly indicate that light scattering at the interface to a glass substrate is the main source of optical losses. Presented waveguide films are suitable for application in evanescent wave sensors.

show abstract

Luminescence Study of Hydrogenated Silicon Oxycarbide (SiOxCy:H) Thin Films Deposited by Hot Wire Chemical Vapor Deposition as Active Layers in Light Emitting Devices

Ramos-Serrano,

Matsumoto,

Ávila

et al. 2024

Inorganics

View full text Add to dashboard Cite

The obtention of luminescent SiOxCy:H thin films deposited by the HW-CVD technique is reported here. We study the effect of different monomethyl-silane (MMS) flow rates on the films properties. An increase in the emission bandwidth and a red-shift was observed when the MMS flow increased. The luminescence was related to optical transitions in band tail states and with less contribution from quantum confinement effects. After, the films were annealed at 750 °C in nitrogen. The annealed film deposited at the highest MMS flow showed an emission spectrum like the as-deposited film, suggesting the same emission mechanisms. By contrast, the annealed film deposited at the lowest MMS flow showed two emission bands. These bands are due to the activation of radiative defects related to oxygen-deficient centers. MOS-like structures were fabricated as electroluminescent devices using the annealed films. Only the structure of the film with the highest carbon content showed light emission in a broad band in the visible spectrum region in forward bias, with a maximum centered close to 850 nm. The light emission mechanism was related to electron thermalization in the band tail states and a direct hole injection into deep states. The trap-assisted tunneling, Poole–Frenkel emissions and Fowler–Nordheim tunneling were proposed as the charge transport mechanism.

show abstract

Low-loss planar optical waveguides based on plasma deposited silicon oxycarbide

Cited by 3 publications

References 19 publications

Silicon Compound Nanomaterials: Exploring Emission Mechanisms and Photobiological Applications

Silicon Compound Nanomaterials: Exploring Emission Mechanisms and Photobiological Applications

Sol-Gel Derived Silica-Titania Waveguide Films for Applications in Evanescent Wave Sensors—Comprehensive Study

Luminescence Study of Hydrogenated Silicon Oxycarbide (SiOxCy:H) Thin Films Deposited by Hot Wire Chemical Vapor Deposition as Active Layers in Light Emitting Devices

Contact Info

Product

Resources

About