Nanofluidics 2016
DOI: 10.1039/9781849735230-00270
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Low Noise Nanopore Platforms Optimised for the Synchronised Optical and Electrical Detection of Biomolecules

Abstract: Nanopores are valuable tools for single-molecule sensing and biomolecular analysis. This can not only be seen from their prevalence in academic and industrial research, but in the growing capabilities at the cutting edge of the field. Recently the demand for improved structural resolution and accelerated analytical throughput has led to the incorporation of additional detection methods, such as fluorescence spectroscopy. The most frequently used solid-state nanopore platforms consist of a bulk silicon substrat… Show more

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“…As shown in Figure , SiN x is first deposited as a window material on both sides of the pretreated silicon substrate by using low-pressure chemical vapor deposition (LPCVD). In this way, a SiN x membrane of tens of nanometers in thickness is obtained . Then, the photoresist is spin-coated onto the SiN x layers; one side is used for photolithography, and the other serves as a protective layer.…”
Section: Developments and Fabrication Of Liquid Cellsmentioning
confidence: 99%
“…As shown in Figure , SiN x is first deposited as a window material on both sides of the pretreated silicon substrate by using low-pressure chemical vapor deposition (LPCVD). In this way, a SiN x membrane of tens of nanometers in thickness is obtained . Then, the photoresist is spin-coated onto the SiN x layers; one side is used for photolithography, and the other serves as a protective layer.…”
Section: Developments and Fabrication Of Liquid Cellsmentioning
confidence: 99%