Low-temperature crystallization of sol–gel-derived lead zirconate titanate thin films using 2.45 GHz microwaves

Preparation and characterisation of PZT films by RF-magnetron sputtering

“…An increasing of losses to ∼40% is also observed at high frequencies, although in the low and intermediate frequency range they are in the range of 10%. Dielectric relaxations in MHz range were also reported for PZT films crystallized by microwave-assisted treatment which show excellent microstructures and good dielectric properties [8]. It seems that such relaxation effects in MHz range are not related to structural defects or to space charge phenomena which are known to be activated at lower frequencies (below 100 Hz).…”

“…PbZr x Ti 1−x O 3 thin films of various compositions have been prepared using different deposition techniques, such as metal organic chemical vapor deposition (MOCVD) [6], chemical routes with metal organic precursors (sol-gel processing) [7,8] and physical deposition routes as laser ablation [9][10][11][12] and RF magnetron sputtering [13][14][15]. Rf-sputtering has gathered considerable interest given the high quality of the resulted films, relative low surface roughness, high crystallinity and adjustable stoichiometry governed by the plasma parameters [16][17][18].…”

Crystallization and grain growth characteristics of yttria-stabilized zirconia thin films grown by pulsed laser deposition

“…Knowledge on the crystallization characteristics and the thermal microstructural evolution is thus essential for the development of 'soft' thin film deposition routes and effective microstructural engineering. However, despite of their technological relevance, the crystallization and grain growth of electroceramic metal oxide layers has been studied only scarcely with a clear focus on piezoelectric lead zirconate titanate (PZT) films [11][12][13][14] and recent reports about ceria-based films [15,16].…”

Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45GHz microwave irradiation

“…13 In recent years, a new approach to decrease the processing temperature is the heating of PZT films by microwave irradiation or microwave annealing. [14][15][16] In our previous study, the effect of multimode microwave irradiation with a frequency of 28 GHz on the low-temperature crystallization of PZT films was investigated. We found that the elevated temperature generated by 28 GHz microwave irradiation used to obtain perovskite PZT films with good electrical properties was only 480°C.…”

“…Bhaskar et al reported that perovskite PZT films could be obtained by using the electric field of 2.45 GHz microwave irradiation at a temperature of 450°C for 30 min. 15,16 However, in their process, SiC rods were used as susceptors, which were necessary in the electric field of microwave irradiation to absorb microwave energy and transfer heat to the PZT thin film. The crystallization of PZT films in the magnetic field of microwave irradiation has not yet been investigated thoroughly and it is uncertain whether or not PZT thin films can be well crystallized into the perovskite phase in the microwave magnetic field at a low temperature.…”