2021
DOI: 10.1016/j.apsusc.2021.150152
|View full text |Cite
|
Sign up to set email alerts
|

Low-temperature growth of crystalline Tin(II) monosulfide thin films by atomic layer deposition using a liquid divalent tin precursor

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
12
0

Year Published

2022
2022
2024
2024

Publication Types

Select...
8

Relationship

3
5

Authors

Journals

citations
Cited by 13 publications
(12 citation statements)
references
References 62 publications
0
12
0
Order By: Relevance
“…Flexible sensors should be made of a lightweight material that is biocompatible, comfortable, and does not cause irritation. Nanocomposite materials mostly include metallic thin films [52,53], carbon nanotubes (CNTs) [54,55], metal nanowires (NWs) [56], metal nanoparticles (NPs) [57], and conductive polymers [58,59]. Good electrochemical activity, high electrical conductivity, and a large active area make the NWs, CNTs, and conductive polymers preferred choices for sensors.…”
Section: Nanocomposite Materials For Flexible Touch Sensorsmentioning
confidence: 99%
“…Flexible sensors should be made of a lightweight material that is biocompatible, comfortable, and does not cause irritation. Nanocomposite materials mostly include metallic thin films [52,53], carbon nanotubes (CNTs) [54,55], metal nanowires (NWs) [56], metal nanoparticles (NPs) [57], and conductive polymers [58,59]. Good electrochemical activity, high electrical conductivity, and a large active area make the NWs, CNTs, and conductive polymers preferred choices for sensors.…”
Section: Nanocomposite Materials For Flexible Touch Sensorsmentioning
confidence: 99%
“…In contrast to conventional techniques such as CVD and PVD that depend on the primary sources of the reactants, the film growth behavior in ALD is controlled through surface-limited chemisorption that governs the half reactions of the self-limited gas-solid surface. [144,[146][147][148][149][150][151][152][153][154][155] To exhibit the fundamental mechanisms of the ALD processes, an ALD progression for the binary compound SnN x is visually demonstrated in Figure 4. As such, binary ALDs can be produced with two precursors.…”
Section: Ald Principlementioning
confidence: 99%
“…Their use also offers a larger window of deposition at lower temperatures as in the cases of ALD of PbS 185 and SnS. 187,188 These precursors can be used for various temperature-sensitive applications that require highquality films.…”
Section: Other Metal Precursorsmentioning
confidence: 99%
“…Hence, deposition of stoichiometric monosulfides such as PbS, SnS, and GeS can be easier by use of divalent metal precursors such as cyclic diamides rather than tetravalent ones. Their use also offers a larger window of deposition at lower temperatures as in the cases of ALD of PbS and SnS. , These precursors can be used for various temperature-sensitive applications that require high-quality films.…”
Section: Metal Precursorsmentioning
confidence: 99%