Low temperature ITO thin film deposition on PES substrate using pulse magnetron sputtering

Lin, Yi‐Cheng; Li, J. Y.; Yen, W. T.

doi:10.1016/j.apsusc.2007.11.006

Cited by 68 publications

(36 citation statements)

References 18 publications

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“…As-deposited ITO films exhibited a resistivity of 3.1 Â 10 À3 V cm and 74% average optical transmission. Recently, Lin et al [12] reported that the ITO films deposited using RF magnetron sputtering without substrate heating had a resistivity of 4 Â 10 À3 V cm. Similarly Yang et al [13] reported that ITO film prepared on a PC substrate by RF magnetron sputtering exhibited an optical transmittance of 75%.…”

Section: Resultsmentioning

confidence: 99%

Low temperature deposition of transparent conducting ITO/Au/ITO films by reactive magnetron sputtering

Kim

2010

Applied Surface Science

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Section: Resultsmentioning

confidence: 99%

Low temperature deposition of transparent conducting ITO/Au/ITO films by reactive magnetron sputtering

Kim

2010

Applied Surface Science

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“…For touch screens, TC electrodes of sheet resistance in the range of 400-700 Ω/cm 2 are required [13]. ITO films have been prepared on polymer substrates using various techniques, such as radio frequency magnetron sputtering [8], ion beam assisted deposition [14], direct current (dc) reactive magnetron sputtering [15], pulse dc magnetron sputtering [16], roll-to-roll dc sputtering [13], dc sputter type negative metal ion source [17,18], etc. To the best of our knowledge the study of ITO prepared by electron beam evaporation technique on polymer substrates has not been reported.…”

Section: Introductionmentioning

confidence: 99%

Properties of Indium Tin Oxide Thin Films Deposited on Polymer Substrates

et al. 2009

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Indium tin oxide thin films with different thicknesses were deposited on polymer substrates, held at room temperature, using electron beam evaporation. The dependence of structural properties, optical properties and room temperature resistivity on the indium tin oxide film thickness was studied. X-ray diffraction illustrates the amorphous structure for all the indium tin oxide prepared films. The high roughness of the polymer substrate affects the properties of indium tin oxide films. The transmittance, the resistivity, and the optical band gap decrease with increasing the film thickness while the refractive index increases. The present indium tin oxide films are amorphous, transparent and have relatively low resistivity. These properties are suitable as transparent electrode for organic light-emitting diodes, touch screens, and in piezoelectric applications.

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“…Figure 3 shows XRD patterns of the ITO monolayer and hybrid layers deposited at RT; analysis was carried out in the 2θ mode over 24-48°. The ITO film shows a (222) peak near 2θ =30° and a (400) diffraction peak near 2θ =35° [17]. The ITO monolayer (Fig.…”

Section: Resultsmentioning

confidence: 99%

Characteristics of ITO/Ag/ITO Hybrid Layers Prepared by Magnetron Sputtering for Transparent Film Heaters

Kim¹,

Kim²,

Yoon³

et al. 2016

Journal of the Optical Society of Korea

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Transparent film heaters (TFHs) based on Joule heating are currently an active research area. However, TFHs based on an indium tin oxide (ITO) monolayer have a number of problems. For example, heating is concentrated in only part of the device. Also, heating efficiency is low because it has high sheet resistance (Rs). To address these problems, this study introduced hybrid layers of ITO/Ag/ITO deposited by magnetron sputtering, and the electrical, optical, and thermal properties were estimated for various thicknesses of the metal interlayer. The Rs of ITO(40)/Ag/ITO(40 nm) hybrid TFHs were 5.33, 3.29 and 2.15 Ω/□ for Ag thicknesses of 10, 15, and 20 nm, respectively, while the Rs of an ITO monolayer (95 nm) was 59.58 Ω/□. The maximum temperatures of these hybrid TFHs were 92, 131, and 145°C, respectively, under a voltage of 3 V. And that of the ITO monolayer was only 32°C. For the same total thickness of 95 nm, the heat generation rate (HGR) of the hybrid produced a temperature approximately 100°C higher than the ITO monolayer. It was confirmed that the film with the lowest Rs of the samples had the highest HGR for the same applied voltage. Overall, hybrid layers of ITO/Ag/ITO showed excellent performance for HGR, uniformity of heat distribution, and thermal response time.

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Low temperature ITO thin film deposition on PES substrate using pulse magnetron sputtering

Cited by 68 publications

References 18 publications

Low temperature deposition of transparent conducting ITO/Au/ITO films by reactive magnetron sputtering

Low temperature deposition of transparent conducting ITO/Au/ITO films by reactive magnetron sputtering

Properties of Indium Tin Oxide Thin Films Deposited on Polymer Substrates

Characteristics of ITO/Ag/ITO Hybrid Layers Prepared by Magnetron Sputtering for Transparent Film Heaters

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