Low-temperature Microwave Annealing Process for Ge MOSFETs

Lee, Y.J.; Chuang, Shang-Shiun; Liu, C.I.; Hsueh, Fu-Kuo; Sung, Po-Jung; Wu, Chi Ting; Lai, Ching-Yi; Wan, Yunhao; Current, Michael; Tseng, Tseung‐Yuen

doi:10.7567/ssdm.2013.b-2-1

Extended Abstracts of the 2013 International Conference on Solid State Devices and Materials 2013

DOI: 10.7567/ssdm.2013.b-2-1

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Low-temperature Microwave Annealing Process for Ge MOSFETs

Y.J. Lee¹,

Shang-Shiun Chuang²,

C.I. Liu³

et al.

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Low-temperature Microwave Annealing Process for Ge MOSFETs

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