2014
DOI: 10.1088/0022-3727/47/13/135301
|View full text |Cite
|
Sign up to set email alerts
|

Low temperature reduction in Ta–O and Nb–O thin films

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

2
4
0

Year Published

2014
2014
2021
2021

Publication Types

Select...
9

Relationship

0
9

Authors

Journals

citations
Cited by 13 publications
(6 citation statements)
references
References 22 publications
2
4
0
Order By: Relevance
“…Compared with the pristine Nb 2 O 5 , additional small peaks centering separately at 205.8 eV and 208.3 eV in the r-Nb 2 O 5 conform to the 3d 5/2 and 3d 3/2 peaks of Nb 4+ (NbO 2 ). 37,38 The emerging Nb 4+ signals suggest that oxygen vacancies are introduced into r-Nb 2 O 5 during the reduction, which is consistent with the abovementioned Raman analysis.…”
Section: Dalton Transactions Papersupporting
confidence: 86%
“…Compared with the pristine Nb 2 O 5 , additional small peaks centering separately at 205.8 eV and 208.3 eV in the r-Nb 2 O 5 conform to the 3d 5/2 and 3d 3/2 peaks of Nb 4+ (NbO 2 ). 37,38 The emerging Nb 4+ signals suggest that oxygen vacancies are introduced into r-Nb 2 O 5 during the reduction, which is consistent with the abovementioned Raman analysis.…”
Section: Dalton Transactions Papersupporting
confidence: 86%
“…It is evident that at increased heating temperatures a larger amount of Cu­(II) is present at the surface. In addition to Cu oxidation near the surface, XPS observations provided in the Supporting Information show that heating Cu 5 Ta 11 O 30 in air results in a partial reduction of Ta­(V) to suboxides, similar to results seen in annealing studies of Ta 2 O 5 . These changes are in part responsible for maintaining charge balance in the crystal during the surface reactions.…”
Section: Resultssupporting
confidence: 59%
“…The ternary alloys also showed the presence of both Ta-C and Hf-C with different proportions according to the different contents of Ta or Hf. Unlike the ternary alloy films, both binary samples showed the presence of very small peaks attributed to Ta-O and Hf-O bonds, with the Ta and Hf 4f 7/2 peaks at around 26.9 26 and 17.3 eV 27 , respectively. The absence of oxides and the lower amount of oxygen in the ternary films, compared to the binary ones, suggest the higher stability of the ternary carbide and its lower reactivity to oxygen.
Figure 3High resolution ( a ) C 1s and ( b ) Ta and Hf 4 f spectra for the different Ta-Hf-C alloy films showing the evolution of the samples as they change from pure TaC to HfC.
…”
Section: Resultsmentioning
confidence: 88%