Low-threshold electrically pumped vertical-cavity surface-emitting microlasers

Design, fabrication, and performance of infrared and visible vertical-cavity surface-emitting lasers

“…2(a)]. The first demonstration of a monolithic VCSEL was achieved with an etched air-post structure [58]. Anisotropic dry etching techniques, such as chemically assisted ion beam etching (CAIBE) [59] or reactive ion etching (RIE) [60], make possible the fabrication of pillar structures with small cross-section areas and smooth vertical sidewalls.…”

The Vertical-Cavity Surface Emitting Laser (VCSEL) and Electrical Access Contribution

“…At the same time, Ibariki (Ibaraki et al, 1989) introduced, into the VCSEL structure, doped Distributed Bragg Reflector (DBR) as mirrors as well for the current injection. Jewell (Jewell et al, 1989) presented the first characterisation of Quantum Wells (QW) GaAs Based Vertical-Cavity Surface Emitting Laser where the DBR and QW introduction is an important breakthrough for the VCSEL technology advance: DBR involves the increase of the reflection coefficient and the QW strongly reduces the threshold current up to few milliamps. Furthermore, the growth of the VCSEL structure by Molecular Beam Epitaxy (MBE) was a crucial advance toward its performance enhancement.…”

Optically Interconnected Intelligent RAM Multiprocessors (OPTO-IRAM)

“…The very important devices, vertical cavity surfaceemitting lasers (VCSELs), were developed [7] and demonstrated [8] in the late 1980s. The first demonstration which VCSEL was electrically pumped was successfully made at room temperature.…”