&lt;title&gt;Electrostatic microshutters-micromirrors array for light modulation systems&lt;/title&gt;

Pizzi, M.; Koniachkine, V.; Bassino, Elena; Sinesi, S.; Perlo, P.

doi:10.1117/12.361258

Cited by 6 publications

(2 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Silicon is the by far dominating MEMS material. However, there are also metallic materials in use for specific MEMS devices, such as optical MEMS shutter arrays for smart glass applications [22][23][24][25][26][27][28][29][30][31] to modulate daylight in windows, for space instrumentation [28], for camera shutters [32], and for artificial eyelids for sensor protection [33] and displays [22][23][24]30,34,35]. In the anchor region, these MEMS shutters are fixed to the transparent conductive oxide layer located on the glass substrate.…”

Section: Introductionmentioning

confidence: 99%

“…For all these metallic and hybrid MEMS shutter and micro-mirror arrays for optical applications [22][23][24][25][26][27][28][29][30][31][32][33][34][35], the closing time or the actuation time is crucial. Since the shutter dynamics is also related to the magnitude of the applied voltage, also the pull-in voltage is involved and of high interest.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Study of Dynamics in Metallic MEMS Cantilevers—Pull-In Voltage and Actuation Speed

et al. 2023

View full text Add to dashboard Cite

For different metals and varying geometries, this paper presents simulations of electrostatically actuated MEMS cantilevers regarding their influence on pull-in voltage and actuation speed. Three-dimensional electromechanical modeling including many non-linearities has been performed to study some static but mainly dynamic features. The results show that the involved parameters have different influences on the actuation speed and pull-in voltage: lower length, higher thickness as well as lower density and higher Young’s modulus of material diminish the actuation time, while longer length, smaller thickness, and smaller Young’s modulus reduce the actuation voltages. Shorter actuation times and smaller actuation voltages cannot be obtained and optimized simultaneously. Different metals such as Au, Ag, Cu, Ti, Ni, Al, W, Cr, Ta, and Mo as well as artificial metals are studied and compared. In this study, Al is found to be the best material for achieving shorter actuation times and smaller actuation voltages. The design rules of MEMS cantilevers are derived considering the large variety of studied parameters. Many involved non-linearities are discussed in detail influencing the MEMS dynamics. Finally, the actuation times are related to the existing experimental actuation times of optical MEMS shutters and MEMS cantilevers.

show abstract