&lt;title&gt;Replication of refractive micro-optomechanical components made with deep lithography with protons&lt;/title&gt;

Tuteleers, Patrik; Vynck, Pedro; Ottevaere, Heidi; Hermanne, Alex; Veretennicoff, Irina; Thienpont, Hugo

doi:10.1117/12.425343

Cited by 12 publications

(9 citation statements)

References 5 publications

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“…After the silicone rubber is cured, the original part is removed and the space is then filled with a twocomponent PolyUrethane, a polymer that after proper curing takes the exact dimensions of the original part (Figure 9a). This polymer has an index of refraction n=1.515 and a thermal conductivity k=0.028 W/mK [11]. It is important however to correctly choose the process parameters to obtain these minimum shrinkage conditions.…”

Section: Replication Of Microlensarraysmentioning

confidence: 99%

<title>Microlens arrays fabricated by deep lithography with protons and their characterization</title>

Ottevaere¹,

Tuteleers

Volchaerts

et al. 2001

SPIE Proceedings

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In this paper we present our latest results on the fabrication and characterization of plastic microlenslet arrays using Deep Lithography with Protons (DLP) and highlight their geometrical dimensions, their surface profile and their uniformity. We also present quantitative information on their optical characteristics such as focal length and spherical aberration as measured with a Mach-Zehnder interferometer. Furthermore we demonstrate the flexibility of the DLP technology to fabricate arrays of microlenses that feature different pitches and different sags. Although the DLP technology is a valuable tool to rapidly prototype refractive micro-optical components, the approach is unpractical for mass-fabrication. We therefore introduce a replication technique, called vacuum casting, which is very appropriate when only a few tens of copies have to be made, and we bring forward the first quantitative characteristics of these microlens replicas.

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Section: Replication Of Microlensarraysmentioning

confidence: 99%

<title>Microlens arrays fabricated by deep lithography with protons and their characterization</title>

Ottevaere¹,

Tuteleers

Volchaerts

et al. 2001

SPIE Proceedings

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“…We used vacuum casting to produce several replicas of our optical interconnection module (OIM) 11 . This technique is based on making a rubber mold from the original OIM which is then used to produce a limited number of copies in high quality optical plastics.…”

Section: The Micro-optical Pathway Blockmentioning

confidence: 99%

Plastic micro-optical modules for VCSEL-based free-space intra-chip interconnections: demonstrator testbeds with OE-FPGAs

et al. 2003

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We fabricated and replicated in semiconductor compatible plastics a multi-channel free-space optical interconnection module designed to establish intra-chip interconnections on an Opto-Electronic Field Programmable Gate Array (OE-FPGA). The micro-optical component is an assembly of a refractive lenslet-array and a high-quality microprism. Both components were prototyped using deep lithography with protons and were monolithically integrated using a vacuum casting replication technique. The resulting 16 channel module shows optical transfer efficiencies of 50% and interchannel cross-talks as low as -22 dB. These characteristics are sufficient to establish multi-channel intra-chip interconnects with OE-FPGA's.The OE-FPGA we used was designed within a European co-founded MEL-ARI consortium, working towards a manufacturable solution for optical interconnects between CMOS IC's. The optoelectronic chip combines fully functional FPGA digital logic with the drivers, receivers and flip-chipped optoelectronic components. It features 2 optical inputs and 2 optical outputs per FPGA cell, amounting to 256 photonic I/O links based on multi-mode 980 nm VCSELs and InGaAs detectors.With a careful alignment of the micro-optical free-space module above the OE-VLSI chip, we demonstrated for the first time to our knowledge multi-channel free-space intra-chip optical interconnections. Data-communication was achieved with 4 simultaneous channels working at 10Mb/s. The bitrate was limited by the chiptester. Notwithstanding the use of non-aggressive 0.6 µm CMOS technology the FPGA will provide an 80 Mbit/s information rate per channel using manchester encoded links. The whole chip therefore has in principle a peak aggregate signalling rate of approximately 20 GBit/s. Furthermore we investigated the possibilities of a more advanced interconnection module prototyped by combining an in-house fabricated baseplate with microlenses and a commercially available micro 3D glass prism. With this approach the channel count is no longer limited by the thickness of the prism we can fabricate with deep lithography with protons. To conclude we report on the integration of this glass prism and our baseplate and on the first results obtained with this interconnection module.

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“…We therefore investigated whether we could mass replicate the DLP micro-optical components. We showed that, using the DLP elements as a master element, it is possible to obtain replicas via different methods: with a LIGA-adapted injection molding technique, hot embossing and through vacuumcasting [3]. In this paper we will focus on the vacuumcasting technology.…”

Section: Introductionmentioning

confidence: 98%

Assessment of vacuum casting replication technology for refractive and diffractive micro-optomechanical components

2003

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In this paper we assess the replication of micro-optical structures through vacuum casting. To that aim we have replicated, besides optical components and structures fabricated with DLP a variety of other optical components: microjet lenses, glass gratings, glass lenses and hybrid integrated systems. Shrinkage is always present on the replicated elements and therefore must be compensated in the master element, if one wants to have correct final dimensions. Furthermore it is of great importance that the replica is crystal-clear and without flow lines or other distortions. This can be obtained by tuning the different process parameters and by working with different types and qualities of polyurethane. In this paper we will highlight our findings on the assessment of the vacuum casting technology with respect to shrinkage, replication quality and transmission efficiency.

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<title>Replication of refractive micro-optomechanical components made with deep lithography with protons</title>

Cited by 12 publications

References 5 publications

<title>Microlens arrays fabricated by deep lithography with protons and their characterization</title>

<title>Microlens arrays fabricated by deep lithography with protons and their characterization</title>

Plastic micro-optical modules for VCSEL-based free-space intra-chip interconnections: demonstrator testbeds with OE-FPGAs

Assessment of vacuum casting replication technology for refractive and diffractive micro-optomechanical components

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