&lt;title&gt;Study on mechanical characteristics of PZT thin film for sensors and actuators&lt;/title&gt;

Wakabayashi, S.; Totani, Hiromi; Sakata, Minoru; Ikeda, Masaaki; Okuno, Hiroshi G.; Takeuchi, Masashi; Yada, Tsuneji

doi:10.1117/12.221288

Cited by 5 publications

(1 citation statement)

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“…15) Therefore, in this study, we focused on piezoelectric acoustic sensors for measuring pressure waves in the highfrequency range of MMG signals. [16][17][18][19][20][21][22][23][24][25][26][27][28][29][30] Since a piezoelectric REGULAR PAPER acoustic sensor measures the voltage generated the sensor element vibrates, it is possible to suppress the power consumption of the entire system to a low level. Therefore, large-capacity batteries become unnecessary, and the sensor becomes applicable to wearable devices.…”

Section: Introductionmentioning

confidence: 99%

Mechanomyogram measurement by lead zirconate titanate-based acoustic sensor

Takei

Aoki

Kobayashi

et al. 2018

Jpn. J. Appl. Phys.

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In this research, we focused on the mechanomyogram (MMG) for evaluating muscle activity. MMG signals were measured using a lead zirconate titanate (PZT)-based acoustic sensor. In previous research on MMG measurement, low-frequency MMG signals ranging from 10 to 100 Hz were mainly measured. On the other hand, where, MMG signals higher than 100 Hz, which is considered to be related to the resonance of muscle fibers, were focused on. To measure high-frequency components of MMG signals, we used a PZT-based acoustic sensor and measured the MMG of the biceps brachii muscle of four subjects. As a result, it was confirmed that all the subjects showed frequency components of 10 Hz to 10 kHz in the MMG. In particular, we confirmed that as the force exerted by the muscles increases, MMG signals of 100 Hz to 10 kHz become larger.

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Section: Introductionmentioning

confidence: 99%

Mechanomyogram measurement by lead zirconate titanate-based acoustic sensor

Takei

Aoki

Kobayashi

et al. 2018

Jpn. J. Appl. Phys.

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Mechanical and Piezoelectric Behavior of Thin Film PZT Composites for MEMS Applications

Yagnamurthy

Chasiotis

2011

MEMS and Nanotechnology, Volume 2

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Control of mechanical response of freestanding PbZr0.52Ti0.48O3 films through texture

Das

Sanchez

Martin

et al. 2016

Applied Physics Letters

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The texture of piezoelectric lead zirconate titanate (PZT) thin films plays a key role in their mechanical response and linearity in the stress vs. strain behavior. The open circuit mechanical properties of PZT films with controlled texture varying from 100% (001) to 100% (111) were quantified with the aid of direct strain measurements from freestanding thin film specimens. The texture was tuned using a highly {111}-textured Pt substrate and excess-Pb in the PbTiO3 seed layer. The mechanical and ferroelastic properties of 500 nm thick PZT (52/48) films were found to be strongly dependent on grain orientation: the lowest elastic modulus of 90 ± 2 GPa corresponded to pure (001) texture, and its value increased linearly with the percentage of (111) texture reaching 122 ± 3 GPa for pure (111) texture. These elastic modulus values were between those computed for transversely isotropic textured PZT films by using the soft and hard bulk PZT compliance coefficients. Pure (001) texture exhibited maximum non-linearity and ferroelastic domain switching, contrary to pure (111) texture that exhibited more linearity and the least amount of switching. A micromechanics model was employed to calculate the strain due to domain switching. The model fitted well the non-linearities in the experimental stress–strain curves of (001) and (111) textured PZT films, predicting 17% and 10% of switched 90° domains that initially were favorably aligned with the applied stress in (001) and (111) textured PZT films, respectively.

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<title>Study on mechanical characteristics of PZT thin film for sensors and actuators</title>

Cited by 5 publications

References 0 publications

Mechanomyogram measurement by lead zirconate titanate-based acoustic sensor

Mechanomyogram measurement by lead zirconate titanate-based acoustic sensor

Mechanical and Piezoelectric Behavior of Thin Film PZT Composites for MEMS Applications

Control of mechanical response of freestanding PbZr0.52Ti0.48O3 films through texture

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