&lt;title&gt;Techniques for improving overlay on multilayer phase-shift masks&lt;/title&gt;

Hamaker, Henry Chris; Bohan, Michael J.; Buck, Peter; Geller, Claudia H.; Makiyama, Takashi; Mathew, Francis P.; Neeland, William S.

doi:10.1117/12.175411

SPIE Proceedings

1994

DOI: 10.1117/12.175411

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<title>Techniques for improving overlay on multilayer phase-shift masks</title>

Henry Chris Hamaker¹,

Michael J. Bohan²,

Peter Buck³

et al.

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