Magnet-Assisted GaN Monolithically Integrated Device for Optical Three-Axis Motion Sensing

Abstract

Motion sensors, capable of detecting acceleration and inclination along the three axes, are essential in emerging domains of robotics, autonomous vehicles, and virtual reality technologies. To meet the growing demands for precise and reliable motion tracking in cutting-edge applications, here, a compact threeaxis motion sensor is developed utilizing a monolithically integrated GaN-based optoelectronic device with split-type magnets. The sensor demonstrates a linear response across an acceleration measurement range of ±10 g for the X-and Y-axes and ±5 g for the Z-axis. It also exhibits fast response and recovery times of 1.50 and 1.03 ms, respectively, along with a minimum detection limit of 0.035 g. The sensor is capable of precisely detecting the tipping angle and acceleration of the dump truck as well as assessing the posture and motion status of unmanned aerial vehicles. The developed sensor offers promising solutions for advancements in automated vehicle operation and robotic motion.