Magnetic Field MEMS-Sensor: Functional Characteristics Control during the Formation of Magnetosensitive Structures

Abstract

In this work the results of substrate temperature effects on coercivity and magnetoresistance in ferromagnetic structures are shown. It was found that with an increase of the substrate temperature from 270 to 390 °C the magnetoresistance increases from 1.2 to 2.3% and the coercive force from 1.6 to 5.3 Oe. A new topology of anisotropic magnetoresistive structures is proposed. In these structures the shape of ferromagnetic elements repeats the shape of nonmagnetic conducting shunts. Sensitivity values obtained for both types of magnetic structures are compared.