Maskless direct laser writing with visible light: Breaking through the optical resolving limit with cooperative manipulations of nonlinear reverse saturation absorption and thermal diffusion

Wei, Jingsong; Wang, Rui

doi:10.1063/1.4869399

Cited by 11 publications

(4 citation statements)

References 25 publications

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“…In many applications, such as cell cultures, [1] artificial tissue engineering [2] or biomedical implants [3] the use of visible light instead of UV light is advantageous. [4] Visible light is also considered to promote wound healing, [5] which is particularly advantageous for the mentioned examples. [6] Furthermore, visible light is consid-ered to be one part of greener chemistry as it can be provided by nature directly.…”

Section: Introductionmentioning

confidence: 99%

Laser Writing of Block‐Copolymer Images into Mesopores Using SBDC‐Initiated Visible‐Light‐Induced Polymerization

et al. 2023

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For miniaturization, as well as for improving artificial nanopore performance, precise local polymer functionalization and the combination of different functionalities are required. Imagining data driven nanopore design automated nanopore functionalization would be beneficial. Using direct laser writing as one option of automated nanopore polymer functionalization visible light induced polymerizations are beneficial. Here, we demonstrate the functionalization of mesoporous silicafilms with two different polymers using automated laser writing. For this we developed a visible light (400–700 nm and 405 nm) N,N(diethylamino)dithiocarbamoylbenzyl(trimethoxy)silane (SBDC) inifierter initiated polymerization. While transferring this visible light induced polymerization using SBDC to a commercially available microscope, direct, automated laser writing, as well as polymer re‐initiation was demonstrated. Thereby, polymer spots of 37 and 40 μm in diameter were achieved using 1–5 seconds for each irradiated spot.

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Section: Introductionmentioning

confidence: 99%

Laser Writing of Block‐Copolymer Images into Mesopores Using SBDC‐Initiated Visible‐Light‐Induced Polymerization

et al. 2023

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“…For a given thermal lithography system, the laser beam spot size is fixed. The heated region size can be reduced using thermal lithography materials with nonlinear absorption characteristics, such as two-photon absorption and reverse saturation absorption [20,21].…”

Section: Introductionmentioning

confidence: 99%

Manipulation of heat-diffusion channel in laser thermal lithography

Wei¹,

Wang²,

Wu³

2014

Opt. Express

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Laser thermal lithography is a good alternative method for forming small pattern feature size by taking advantage of the structural-change threshold effect of thermal lithography materials. In this work, the heat-diffusion channels of laser thermal lithography are first analyzed, and then we propose to manipulate the heat-diffusion channels by inserting thermal conduction layers in between channels. Heat-flow direction can be changed from the in-plane to the out-of-plane of the thermal lithography layer, which causes the size of the structural-change threshold region to become much smaller than the focused laser spot itself; thus, nanoscale marks can be obtained. Samples designated as "glass substrate/thermal conduction layer/thermal lithography layer (100 nm)/thermal conduction layer" are designed and prepared. Chalcogenide phase-change materials are used as thermal lithography layer, and Si is used as thermal conduction layer to manipulate heat-diffusion channels. Laser thermal lithography experiments are conducted on a home-made high-speed rotation direct laser writing setup with 488 nm laser wavelength and 0.90 numerical aperture of converging lens. The writing marks with 50-60 nm size are successfully obtained. The mark size is only about 1/13 of the focused laser spot, which is far smaller than that of the light diffraction limit spot of the direct laser writing setup. This work is useful for nanoscale fabrication and lithography by exploiting the far-field focusing light system.

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“…[6][7][8][9] Nonlinear reverse saturation absorption can form below-diffraction-limited energy absorption region that can be used to conduct nanoscale maskless direct laser writing. 10,11 In nonlinear refraction, the nonlinear Fabry-Perot cavity has been proposed to form a nanoscale central hot spot when the nonlinear medium thickness is within the magnitude of the incident light wavelength. 12,13 However, when the nonlinear medium thickness is larger than the incident light wavelength, multiple interferences within the nonlinear Fabry-Perot cavity become inconspicuous and the self-focusing effect becomes dominant.…”

Section: Introductionmentioning

confidence: 99%

Laser beam induced nanoscale spot through nonlinear “thick” samples: A multi-layer thin lens self-focusing model

Wei

Hui

2014

Journal of Applied Physics

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Self-focusing is a well-researched phenomenon. Nanoscale spots can be achieved through selffocusing, which is an alternative method for achieving high-density data storage, high-resolution light imaging, and maskless nanolithography. Several research groups have observed that self-focusing spots can be reduced to nanoscale levels via incident laser power manipulation. Self-focusing spots can be analyzed by solving the nonlinear Schr€ odinger equation and the finite difference time domain method. However, both procedures are complex and time-consuming. In the present work, a multilayer thin-lens self-focusing model that considers diffraction effects and changes of refractive index along the radial and film thickness directions is proposed to analyze the self-focusing behavior and traveling process of light beams intuitively. The self-focusing behaviors of As 2 S 3 are simulated, and results show that a nanoscale self-focusing spot with a radius of about 0:12 lm can be formed at the bottom of nonlinear sample when the incident laser power exceeds 4:25 mW. Our findings are basically consistent with experimental reports and provide a good method for analyzing and understanding the self-focusing process. An appropriate application schematic design is also provided.

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Maskless direct laser writing with visible light: Breaking through the optical resolving limit with cooperative manipulations of nonlinear reverse saturation absorption and thermal diffusion

Cited by 11 publications

References 25 publications

Laser Writing of Block‐Copolymer Images into Mesopores Using SBDC‐Initiated Visible‐Light‐Induced Polymerization

Laser Writing of Block‐Copolymer Images into Mesopores Using SBDC‐Initiated Visible‐Light‐Induced Polymerization

Manipulation of heat-diffusion channel in laser thermal lithography

Laser beam induced nanoscale spot through nonlinear “thick” samples: A multi-layer thin lens self-focusing model

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