2019
DOI: 10.1016/j.surfcoat.2018.10.008
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Material structure and piezoresistive properties of niobium containing diamond-like-carbon films

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Cited by 7 publications
(12 citation statements)
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“…This is not a linear relation, as the carbon is also poisoning the Nb target and thereby decreasing the sputter yield of the metal. The achieved Nb/C ratio on ceramics was found to be in the same range as previoulsy reported for a-C:H:Nb coatings on Kapton HN [10]. Along with the Nb/C ratio, the content of C-C bonds in the film is changed.…”
Section: Electrical Properties and Morphologysupporting
confidence: 82%
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“…This is not a linear relation, as the carbon is also poisoning the Nb target and thereby decreasing the sputter yield of the metal. The achieved Nb/C ratio on ceramics was found to be in the same range as previoulsy reported for a-C:H:Nb coatings on Kapton HN [10]. Along with the Nb/C ratio, the content of C-C bonds in the film is changed.…”
Section: Electrical Properties and Morphologysupporting
confidence: 82%
“…Earlier investigations in a static process showed promising results for a-C:H:Nb as strain sensor material on industrial polyimide foil (Kapton HN) with gauge factors of up to 35.5 and the possibility to adapt the TCR to values between ±100 ppm/K for both HIPIMS and DCMS processes [10]. To analyze the substrate impact on the system and enhance the reproducibility, coating experiments were carried out on ceramic substrates and a polyimide foil of lower surface roughness and higher homogeneity (PI 2611), coated in a dynamic process with rotating substrate holder.…”
Section: Resultsmentioning
confidence: 99%
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