Optics Damage and Materials Processing by EUV/X-ray Radiation (XDam8) 2023
DOI: 10.1117/12.2664746
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Materials under XUV irradiation: effects of structure, size, and temperature

Abstract: This proceeding discusses the impact of XUV/X-ray irradiation on materials, and how their response is affected by temperature, size, and structure. When materials are exposed to intense XUV/X-ray irradiation, they undergo a series of processes ultimately leading to observable structure modification and damage. These effects were studied with a hybrid simulation tool XTANT-3. The code combines several methods in one interconnected model: the photon absorption and electron cascades are simulated with transport M… Show more

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