Measurement Accuracy in Phase-Shifting Point Diffraction Interferometer with Two Optical Fibers

Matsuura, Toshiaki; Okagaki, Satoru; Nakamura, Takaaki; Oshikane, Yasushi; Inoue, Hirokazu; Nakano, Masahiro; Kataoka, Toshihiko

doi:10.1007/s10043-007-0401-x

Cited by 8 publications

(3 citation statements)

References 6 publications

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“…In general, a rotating ground glass plate is used as the projection plane (Otaki et al, 2002a;Otaki et al, 2002b), but it may generate mechanical vibration. Instead of the ground glass, we tested a Fiber Optic Window (FOW) as the projection plane (Matsuura et al, 2007). The external view and magnified surface image of the FOW are shown in fig.…”

Section: Measurement Error Caused By Projection Planementioning

confidence: 99%

Phase-Shifting Point Diffraction Interferometer Having Two Point Light Sources of Single-Mode Optical Fibers

Oshikane¹,

Nakano²,

Inoue³

2012

Selected Topics on Optical Fiber Technology

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Section: Measurement Error Caused By Projection Planementioning

confidence: 99%

Phase-Shifting Point Diffraction Interferometer Having Two Point Light Sources of Single-Mode Optical Fibers

Oshikane¹,

Nakano²,

Inoue³

2012

Selected Topics on Optical Fiber Technology

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“…Fiber RWS [12,[15][16][17] generates the reference wavefront by diffraction at the end face of the single-mode fiber (SMF). Due to high light transmittance of the SMF, power of the generated reference wavefront is high [12].…”

Section: Introductionmentioning

confidence: 99%

Comparison of Fiber-to-Waveguide Couplers in Point Diffraction Interferometer Based on Waveguide Reference Wavefront Source

et al. 2020

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To improve the power of reference wavefront generated by reference wavefront source (RWS) based on silicon nitride (SiN) waveguide in point diffraction interferometer (PDI), we design the Y-branch coupler and grating coupler, and then compare the maximum coupling efficiency, 3 dB fabrication tolerance, 3 dB alignment tolerance and polarization dependent loss of two couplers. Our results show that grating coupler has higher coupling efficiency, lower etching difficulty and alignment difficulty, while Y-branch coupler has lower coating difficulty. To get the maximum efficiency, mode in the fiber must be TE mode no matter for grating coupler or Y-branch coupler. This paper improves the power of the wavefront by selecting appropriate fiber-to-waveguide couplers for waveguide RWS. PDI based on the power improved waveguide RWS is expected to be used in many measurement fields.

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“…Thus, the fiber point-diffraction spherical wavefront [8][9][10][11][12][13][14] plays the role as ideal measurement reference, and it determines the achievable measurement accuracy of the system. The numerical aperture (NA) of traditional fiber PDI is smaller than 0.20 [4,5,[15][16][17]. To extend the measurement range with optical fiber, a submicron-aperture fiber [8,18] with cone-shaped exit end has been proposed to get both high-NA and high-intensity spherical wave.…”

Section: Introductionmentioning

confidence: 99%

Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer

Wang

Liang

et al. 2017

SPIE Proceedings

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The submicron-aperture fiber point-diffraction interferometer (SFPDI) can be applied to realize the measurement of three-dimensional absolute displacement within large range, in which the performance of point-diffraction wavefront and numerical iterative algorithm for displacement reconstruction determines the achievable measurement accuracy, reliability and efficiency of the system. A method based on fast searching particle swarm optimization (FS-PSO) algorithm is proposed to realize the rapid measurement of three-dimensional absolute displacement. Based on the SFPDI with two submicron-aperture fiber pairs, FS-PSO method and the corresponding model of the SFPDI, the measurement accuracy, reliability and efficiency of the SFPDI system are significantly improved, making it more feasible for practical application. The effect of point-diffraction wavefront error on the measurement is analyzed. The error of pointdiffraction wavefront obtained in the experiment is in the order of 1×10 -4 λ (the wavelength λ is 532 nm), and the corresponding displacement measurement error is smaller than 0.03 μm. Both the numerical simulation and comparison experiments have been carried out to demonstrate the accuracy and feasibility of the proposed SFPDI system, high measurement accuracy in the order of 0.1 μm, convergence rate (~90.0%) and efficiency have been realized with the proposed method, providing a feasible way to measure three-dimensional absolute displacement in the case of no guide rail.

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Measurement Accuracy in Phase-Shifting Point Diffraction Interferometer with Two Optical Fibers

Cited by 8 publications

References 6 publications

Phase-Shifting Point Diffraction Interferometer Having Two Point Light Sources of Single-Mode Optical Fibers

Phase-Shifting Point Diffraction Interferometer Having Two Point Light Sources of Single-Mode Optical Fibers

Comparison of Fiber-to-Waveguide Couplers in Point Diffraction Interferometer Based on Waveguide Reference Wavefront Source

Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer

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