Measurements of electron temperature and ion density in an ac pulsed CO plasma study

Abstract

Emission spectroscopy was applied to observe CO plasma, which was generated by AC discharge at the pressure range between 0.2 to 0.9 Torr. Electron temperature and ion density measurements were performed using a double Langmuir probe. Measured electron temperature was found to be inversely proportional to pressure, while ion density shows increasing behavior as a function of discharge pressure. Within the plasma conditions under consideration, O2, O2+, O, C2, C2–, CO and CO+ play a dominant role in the pulsed plasma process within the spectral range of (200‐800 nm), and the importance of these components vary little under the conditions of the plasma studied in this work. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)