1993
DOI: 10.1021/j100119a035
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Measurements of the absolute concentrations of hydrogen atom and hydroxyl produced in the silyl + oxygen reaction: determination of the product branching ratios

Abstract: Absolute concentrations of H atoms and OH radicals were measured to determine the product branching ratios for the reactions SiH3 + 0 2 -SiH20 + O H (1 b) and SiH3 + 0 2 -SiH202 + H (IC) by using laser-induced fluorescence (LIF) techniques. The intensity of the VUV-LIF signal of H atoms at Lyman CY wavelength was calibrated against the absolute concentration determined by the simultaneous measurement of the Lyman CY resonant absorption. The calibration for the UV-LIF signal intensity of O H radicals has been p… Show more

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Cited by 34 publications
(33 citation statements)
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“…A modern laser RFS setup with the multiplication of light frequency to record hydrogen atoms in [12] has a working range of 10 11 < [H] < 2.6·10 12 atom/cm 3 , which is almost three orders of magnitude inferior to the sensitivity threshold and working range of the present work.…”
Section: Experimental Techniquementioning
confidence: 60%
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“…A modern laser RFS setup with the multiplication of light frequency to record hydrogen atoms in [12] has a working range of 10 11 < [H] < 2.6·10 12 atom/cm 3 , which is almost three orders of magnitude inferior to the sensitivity threshold and working range of the present work.…”
Section: Experimental Techniquementioning
confidence: 60%
“…The chain-branching process (CBP) of oxidation of silane (SiH 4 ) was investigated in [3][4][5][6][7][8][9][10][11][12][13][14][15]. Azatyan et al [5][6][7] studied the reactor surface in contact with silane flame in oxygen.…”
mentioning
confidence: 99%
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“…For the branching reactions such as SiH 3 → products, or H → products, the characteristic duration of reaction is of order of 10 −3 s [11].…”
mentioning
confidence: 99%