“…Azatyan et al [5][6][7] studied the reactor surface in contact with silane flame in oxygen. Intermediate reaction products (H, O, OH, SiH 3 , :SiH 2 , SiO, Si, SiH 2 O 2 , and SiH 2 O) in gas have been examined by modern methods [8,[11][12][13][14]. The final gas-phase products in this reaction are water and molecular hydrogen [8].…”