Measuring MEMS in Motion by Laser Doppler Vibrometry

Rembe, Christian; Siegmund, Georg; Steger, Heinrich F.; Wörtge, Michael

doi:10.1201/9780429186738-11

Cited by 31 publications

(33 citation statements)

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“…The Doppler shift is then generated through an optical path length variation. The interested reader might find more detailed information related to the mathematical derivation of (5) in [3].…”

Section: Ael Accessible Emission Limitsmentioning

confidence: 99%

“…The interested reader might refer to [3,4] for further information regarding demodulation of Doppler signal in vibrometers.…”

Section: Demodulation Of Doppler Signalsmentioning

confidence: 99%

“…Therefore, the noise level of a laser vibrometer is usually defined in displacement per square root Hertz. The significant noise sources of a laser vibrometer have to be analyzed in order to understand the limits of resolution [3]. This thermal-noise contribution i th to the mean detector current…”

Section: Noise and Resolutionmentioning

confidence: 99%

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Laser Doppler Vibrometry Measurements in Structural Dynamics

Chiariotti¹,

Rembe²,

Castellini³

et al. 2020

Handbook of Experimental Structural Dynamics

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Laser vibrometry is a powerful tool for measurement of vibration on a variety of structures. Lasers do not mass-load or otherwise change the dynamics of a structure, and so they have enabled measurements from surfaces that are too light, delicate, hot, etc. to allow conventional surface mounted sensors. The position of the measurement point can also be changed readily. Thus, laser vibrometry has also allowed acquisition of measurements over a dense grid of points, to more completely characterize a structure its deformation shapes, the evolution of stress waves, or the identification of structural damages than it might be feasible with other methods. The chapter is divided in two sections: the first one is intended to provide an insight about the theory behind laser Doppler vibrometry (LDV), while the second section aims at giving an overview of the different types of laser Doppler vibrometers that have been developed so far. The chapter is not intended to give a comprehensive discussion of laser Doppler vibrometry, but it provides sufficient details about potentials, issues, and best practice approaches for successfully exploiting such technique in structural dynamics testing. References are provided to direct the interested reader to more detailed information as well as to examples of application cases.

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Section: Ael Accessible Emission Limitsmentioning

confidence: 99%

“…The interested reader might refer to [3,4] for further information regarding demodulation of Doppler signal in vibrometers.…”

Section: Demodulation Of Doppler Signalsmentioning

confidence: 99%

See 1 more Smart Citation

Laser Doppler Vibrometry Measurements in Structural Dynamics

Chiariotti¹,

Rembe²,

Castellini³

et al. 2020

Handbook of Experimental Structural Dynamics

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“…Für die Messung der Betriebsschwingung von Mikrosystemen und Oberflächenwellen-(SAW)-Filter im Betrieb bis einige GHz bedarf es einer breitbandigen, empfindlichen und vor allem berührungslosen Messtechnik. Diese Anforderungen werden insbesondere von Laser-Doppler-Vibrometern (LDV) erfüllt, welche mit Hilfe des Laser-Doppler-Effekts die Phasenmodulation der Streustrahlung von einem Messobjekt interferometrisch detektieren [8]. Die erfasste Phasenmodulation ist dabei linear in eine Wegmodulation in Richtung des Laserstrahls überführbar.…”

Section: Introductionunclassified

“…Da Mikrosysteme zumeist eine dreidimensionale Bewegung vollziehen, kommt es vor allem an Kanten oder Imperfektionen der Oberfläche zu einer Variation der Reflektivität. Der Laser-Doppler-Effekt führt in heterodynen LDV dazu, dass die Trägerfrequenz phasenmoduliert wird [8]. Dadurch ist die heterodyne LDV-Technik unempfindlich gegenüber Reflektivitätsvariationen und Nichtlinearitäten der Photodetektoren (z.B.…”

Section: Introductionunclassified

Heterodynes Laser-Doppler-Vibrometer mit gekoppelten Diodenlasern zur Schwingungsanalyse von SAW-Filtern / Heterodyne laser-Doppler vibrometer with frequency-offset-locked diode lasers for vibration analysis of SAW filters

Kowarsch

Rembe

2019

Tm - Technisches Messen

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ZusammenfassungHeterodyne Interferometer messen Schwingungsamplituden bei Frequenzen > 100MHz mit definierter Messunsicherheit im Gegensatz zu homodynen Verfahren. Die geringe Effizienz von Bragg-Zellen als Frequenzschieber bei Frequenzen > 409MHz limitieren den Einsatz von heterodynen Interferometern im Gigahertz- Bereich. In diesem Beitrag stellen wir ein heterodynes Laser-Doppler-Vibrometer-Mikroskop vor, in dem eine optoelektronische Phasenregelschleife zwei Diodenlaser auf eine Frequenzdifferenz regelt und die Trägerfrequenz erzeugt. Unser Messsystem bietet eine Auflösung von Schwingungsamplituden im Pikometer-Bereich bei Schwingungsfrequenzen von 10MHz bis 700MHz. Die Messfähigkeit der Betragsamplitude und Phase der Schwingung wird am Messbeispiel eines Oberflächenwellen-Filters demonstriert.

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Photostrictive Actuators Based on Freestanding Ferroelectric Membranes

Ganguly,

Pesquera,

Garcia

et al. 2024

Advanced Materials

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Complex oxides offer a wide range of functional properties, and recent advances in fabrication of freestanding membranes of these oxides are adding new mechanical degrees of freedom to this already rich functional ecosystem. Here, we demonstrate photoactuation in freestanding thin film resonators of ferroelectric Barium Titanate (BaTiO3) and paraelectric Strontium Titanate (SrTiO3). The free‐standing films, transferred onto perforated supports, act as nano‐drums, oscillating at their natural resonance frequency when illuminated by a frequency‐modulated laser. The light‐induced deflections in the ferroelectric BaTiO3 membranes are two orders of magnitude larger than in the paraelectric SrTiO3 ones. Time‐resolved X‐ray micro‐diffraction under illumination and temperature‐dependent and holographic interferometry provide combined evidence for the photostrictive strain in BaTiO3 originating from partial screening of ferroelectric polarization by photo‐excited carriers, which decreases the tetragonality of the unit cell. These findings showcase the potential of photostrictive freestanding ferroelectric films as wireless actuators operated by light.This article is protected by copyright. All rights reserved

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Measuring MEMS in Motion by Laser Doppler Vibrometry

Cited by 31 publications

References 1 publication

Laser Doppler Vibrometry Measurements in Structural Dynamics

Laser Doppler Vibrometry Measurements in Structural Dynamics

Heterodynes Laser-Doppler-Vibrometer mit gekoppelten Diodenlasern zur Schwingungsanalyse von SAW-Filtern / Heterodyne laser-Doppler vibrometer with frequency-offset-locked diode lasers for vibration analysis of SAW filters

Photostrictive Actuators Based on Freestanding Ferroelectric Membranes

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