Mechanical property evaluation and failure analysis of cantilevered LIGA nickel microposts

Stephens, Lyndon Scott; Kelly, Kevin W.; Simhadri, S.; McCandless, Andrew; Meletis, Efstathios I.

doi:10.1109/84.946780

Cited by 62 publications

(40 citation statements)

References 16 publications

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“…The fine grain size might be the reason for the ultra high tensile strength. Stephens et al (2001) also obtained such high tensile strength (2.1 GPa) in the Watts electroplated nickel specimens when their grain size below 1 lm and their result is very close to ours. The .…”

Section: Tensile Test Resultssupporting

confidence: 90%

A directly strain measuring method for electroplated nickel micro-tensile test

Wang

et al. 2010

Microsyst Technol

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In order to avoid the post-processing in microtensile tests, a directly strain measuring method is presented in this paper. The nickel tensile test specimen was electroplated in Watts solution under certain conditions. The measured Young's modulus, ultimate tensile strength and elongation are 171.5 GPa, 2.18 GPa and 13.8%, respectively. By comparing these results to that obtained by the traditional method, this new approach has been proved reliable. Furthermore, the mean grain size of the nickel specimen measured by TEM images is about 160 nm with wide distribution. The XRD results show that nickel thin film in our experiment has no preferred orientation in the growth direction. The dimple rupture with small microvoids has been observed after the fracture of specimen.

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Section: Tensile Test Resultssupporting

confidence: 90%

A directly strain measuring method for electroplated nickel micro-tensile test

Wang

et al. 2010

Microsyst Technol

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“…The electroplated Ni film has the advantages of low-residual stress, high density, and superior mechanical strength and can be formed as a high-aspect-ratio microstructure by photolithography [21][22][23]. As to the mechanical properties of electroplated Ni film from the previously works [24][25][26][27] referred and the quasi-static bending beam test using nanoindentation system in our research [28] presented are summarized in Table 2. Our research presented [15] 179~225 660~1120…”

Section: Fabricationmentioning

confidence: 98%

Design and fabrication of acoustic wave actuated microgenerator for portable electronic devices

Lai

Huang

Tsou

2008

2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

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Abstract-An acoustic wave actuated microgenerator for power system applications in mobile phone was design, fabricated, and characterized. We used the acoustic wave of human voices or speakerphone by way of an electromagnetic transducer to produce electrical power for charging or to run a portable electronic device. The proposed microgenerator is composed of a planar coil, a suspension plate with supporting beams and a permanent magnet. In this paper, the dynamic response of the suspension structure and the variation of the induced magnetic flux were characterized by using commercial finite element analysis and Ansoft Maxwell EM3D software, respectively. The electroplating nickel and silicon bulk micromachining techniques were used to fabricate the suspension plate and planar coil, and by integrating a permanent magnet as well as wafer to wafer adhesion bonding to accomplish the microgenerator assembly. The experimental results shown the typical microgenerator with a planar dimension of 3 mm × 3 mm, the maximum induce-voltage 0.24 mV was generated at the driving frequency of 470 Hz. The dynamic response of microgenerator can be designed to meet a specific acoustic driving frequency to increase the efficiency of energy harvesting.

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“…The surface energy c s of nickel is 2240 mJ/m 2 (Tyson and Miller 1977). The elastic modulus E of bulk nickel is 207 GPa (Stephens et al 2001). The bulk nickel value was used since the value for LIGA electroplated nickel varies significantly in the literature and depends heavily on electroplating conditions.…”

Section: Critical Dimension Examplesmentioning

confidence: 99%

Stiction issues and actuation of RF LIGA-MEMS variable capacitors

et al. 2008

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High aspect ratio variable capacitors have been fabricated using deep X-ray lithography and electroplating. Stiction phenomena applicable to high aspect ratio devices are presented, including the conditions for stiction to occur and the critical dimensions of structures. Actuation tests at 3 GHz are also presented and show a maximum capacitance of 0.86 pF with no actuation voltage and a minimum capacitance of 0.70 pF with an actuation voltage of 20 V just before pull-in, which gives a tuning range of 1.23:1. Corresponding Q-factor values are 49.3 and 70.8 respectively. After pull-in, the measured capacitance is 0.61 pF, corresponding to a tuning range of 1.41:1, with a maximum Q-factor of 102.9.

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Mechanical property evaluation and failure analysis of cantilevered LIGA nickel microposts

Cited by 62 publications

References 16 publications

A directly strain measuring method for electroplated nickel micro-tensile test

A directly strain measuring method for electroplated nickel micro-tensile test

Design and fabrication of acoustic wave actuated microgenerator for portable electronic devices

Stiction issues and actuation of RF LIGA-MEMS variable capacitors

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