Membrane-based thermal flow sensors on flexible substrates

Sturm, Hannes; Lang, Walter

doi:10.1016/j.sna.2013.03.004

Cited by 30 publications

(11 citation statements)

References 30 publications

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“…The hot-film flowmeter consists of a thin-film resistive heater that dissipates heat to the surrounded fluid. The fluid flow rate is directly proportional to the sensor heat loss that can be detected by the change in the film resistance [ 109 ], or voltage change [ 110 ], or the required power to keep the heater constant at a specific temperature [ 111 , 112 ]. The calorimetric flow sensor involves a thin film heater located between a minimum of two thermal sensors.…”

Section: Pipes Flow Sensorsmentioning

confidence: 99%

A Review of the Real-Time Monitoring of Fluid-Properties in Tubular Architectures for Industrial Applications

Nour

Hussain

2020

Sensors

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The real-time monitoring of fluid properties in tubular systems, such as viscosity and flow rate, is essential for industries utilizing liquid mediums. Nowadays, most studies of the fluid characteristics are performed off-line using laboratory facilities that can provide accurate results, yet they do not match the demanded industrial pace. Off-line measurements are ineffective and time-consuming. The available real-time monitoring sensors for fluid properties are generally destructive methods that produce significant and persistent damage to the tubular systems during the installation process. Others use huge and bulky invasive instrument methods that generate considerable pressure reduction and energy loss in tubular systems. For these drawbacks, industries centered their attention on non-invasive and non-destructive testing (NDT) methodologies, which are installed on the outer tubular surface to avoid flow disturbance and desist shutting down systems for installations. Although these sensors showed excellent achievement for monitoring and inspecting pipe health conditions, the performance was not convincing for monitoring the properties of fluids. This review paper presents an overview of the real-time monitoring of fluid properties in tubular systems for industrial applications, particularly for pipe monitoring sensors, viscosity, and flow measurements. Additionally, the different available sensing mechanisms and their advantages, drawbacks, and potentials are discussed.

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Section: Pipes Flow Sensorsmentioning

confidence: 99%

A Review of the Real-Time Monitoring of Fluid-Properties in Tubular Architectures for Industrial Applications

Nour

Hussain

2020

Sensors

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“…By monitoring the voltage signal of the thermal tuft sensor, the instantaneous flow direction can be determined. 10,12 3. Experimental Setup…”

Section: Wind Tunnel Testing Using Mems Thermal Flow Sensors and Hot mentioning

confidence: 99%

“…Later, a number of researchers [10][11][12][13] have paid contribution to the development of flexible thermal sensors and employed the sensors in wind tunnel. Shikida et al 11 used a gold-chromium (Au-Cr) sensor fabricated on a flexible substrate to control the air flow rate in a building air-conditioning system.…”

Section: Introductionmentioning

confidence: 99%

MEMS flexible thermal flow sensor for measurement of boundary layer separation

Leu

Miau

et al. 2016

Mod. Phys. Lett. B

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Micro-electro-mechanical systems (MEMS) thermal flow sensors featured with high spatial resolutions, fast frequency response and minimal interference with fluid flow have been applied widely in boundary-layer studies and aerodynamic flow sensing and control due to the inherent outstanding performances. In this study, MEMS thermal flow sensors were designed and fabricated on a flexible skin using the MEMS technology. The dimension of a single sensing element was 200 [Formula: see text]m × 260 [Formula: see text]m, which had a resistance of about 200 [Formula: see text] after annealing. By configuring thermal flow sensors in either a single thermal flow sensor and a thermal tuft sensor, separation points of a two-dimensional (2D) LS(1) 0417 airfoil at various angles of attack could be precisely detected. The experimental results show good agreement with the hot wire sensor and particle traced flow visualization in detecting the separation point on the suction surface of the airfoil.

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“…The micro-machined thermal flow sensor based on silicon technology was firstly developed in 1974 [ 19 ]. With the development of flexible electronics, several flexible flow sensors have been reported in recent years [ 20 ]. Petropoulos A. et al developed a flexible gas flow sensor which was fabricated on a flexible PCB substrate and was able to quantify 0–10 SLPM flow rate [ 21 ].…”

Section: System Designmentioning

confidence: 99%

Smart Sensing Strip Using Monolithically Integrated Flexible Flow Sensor for Noninvasively Monitoring Respiratory Flow

Jiang

Zhao

Zhu

2015

Sensors

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This paper presents a smart sensing strip for noninvasively monitoring respiratory flow in real time. The monitoring system comprises a monolithically-integrated flexible hot-film flow sensor adhered on a molded flexible silicone case, where a miniaturized conditioning circuit with a Bluetooth4.0 LE module are packaged, and a personal mobile device that wirelessly acquires respiratory data transmitted from the flow sensor, executes extraction of vital signs, and performs medical diagnosis. The system serves as a wearable device to monitor comprehensive respiratory flow while avoiding use of uncomfortable nasal cannula. The respiratory sensor is a flexible flow sensor monolithically integrating four elements of a Wheatstone bridge on single chip, including a hot-film resistor, a temperature-compensating resistor, and two balancing resistors. The monitor takes merits of small size, light weight, easy operation, and low power consumption. Experiments were conducted to verify the feasibility and effectiveness of monitoring and diagnosing respiratory diseases using the proposed system.

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Membrane-based thermal flow sensors on flexible substrates

Cited by 30 publications

References 30 publications

A Review of the Real-Time Monitoring of Fluid-Properties in Tubular Architectures for Industrial Applications

A Review of the Real-Time Monitoring of Fluid-Properties in Tubular Architectures for Industrial Applications

MEMS flexible thermal flow sensor for measurement of boundary layer separation

Smart Sensing Strip Using Monolithically Integrated Flexible Flow Sensor for Noninvasively Monitoring Respiratory Flow

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