MEMS actuators for biomedical applications: a review

Abstract

Micro-electromechanical-system (MEMS) based actuators, which transduce certain domains of energy into mechanical movements in the microscopic scale, are increasingly contributing to the areas of biomedical engineering and healthcare applications. They are enabling new functionalities in biomedical devices through their unique miniaturized features. An effective selection of a particular actuator, among a wide range of actuator types available in the MEMS field, needs to be made through the assessment of many factors involved in both the actuator itself and the target application. This paper presents an overview of the state-of-the-art MEMS actuators that have been developed for biomedical applications. The actuation methods, working principle, and imperative features of these actuators are discussed along with their specific applications. An emphasis of this review is placed on temperature-responsive, electromagnetic, piezoelectric, and fluid-driven actuators towards various application areas including lab-on-a-chip, drug delivery systems, cardiac devices and surgical tools. It also highlights the key issues of MEMS actuators in light of biomedical applications.

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

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Research on magnetic bead motion characteristics based on magnetic beads preset technology

“…According to the differences of magnetic field sources, the research about magnetic bead control technology is mainly divided into two categories: micro-electro-mechanical system (MEMS) and external permanent magnet system. Generally speaking, although the MEMS technology has higher integration, the following problems 25 , 26 exist: (1) the integrated coil will generate heat, and a new heat source will be introduced on the chip, which will be difficult to adapt to the temperature sensitive sample; (2) the magnetic induction generated by MEMS is not high, so the separation efficiency is low; (3) the processing of MEMS is complicated and difficult; (4) the chip used in MEMS is usually opaque, which will be unfavorable for optical detection. However, the external permanent magnet system is relatively simple, which will not affect microchannel design and will be easy to achieve magnetic field control.…”

Robotic micromanipulation: a) actuators and their application

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