Encyclopedia of Analytical Chemistry 2021
DOI: 10.1002/9780470027318.a9376.pub2
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MEMS‐ and MOEMS‐Based Visible and Near‐Infrared Spectrometers

Abstract: The trend in near‐infrared (NIR) spectroscopy is to go toward on‐site, in‐field, on‐the‐go applications with calibration‐free instruments and off‐the‐shelf chemometrics software. Micro‐electro‐mechanical systems (MEMS) and micro‐opto‐electro‐mechanical systems (MOEMS) represent manufacturing techniques and components, capable of enabling highly miniaturized, robust, and low‐cost sensors and actuators. This article presents common MEMS and MOEMS manufacturing techniques and gives an insight into the demands of … Show more

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Cited by 8 publications
(5 citation statements)
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“…Consistently with what was already pointed out by the literature on this kind of instrumentation [36], a strict dependence on the considered application [2] and the particle Differences in the instrumental technologies (e.g., use of optical fiber, dimension of the spectral window, light source) strictly influence the path of light and, thus, the obtained signal. The sensors can scan different sample areas depending on the technological features, and this could be a key point when dealing with inhomogeneous samples [35].…”
Section: Spectrasupporting
confidence: 82%
See 1 more Smart Citation
“…Consistently with what was already pointed out by the literature on this kind of instrumentation [36], a strict dependence on the considered application [2] and the particle Differences in the instrumental technologies (e.g., use of optical fiber, dimension of the spectral window, light source) strictly influence the path of light and, thus, the obtained signal. The sensors can scan different sample areas depending on the technological features, and this could be a key point when dealing with inhomogeneous samples [35].…”
Section: Spectrasupporting
confidence: 82%
“…Consistently with what was already pointed out by the literature on this kind of instrumentation [36], a strict dependence on the considered application [2] and the particle size of the sample has to be considered [37,38]. In this sense, other interesting aspects arise from the evaluation of the compactness of the samples, which influences the spectra at the reproducibility level.…”
Section: Spectramentioning
confidence: 63%
“…The recent progress in NIR spectrometer miniaturization has taken advantage of new micro-technologies, such as MEMS (Micro-Electro-Mechanical Systems) and MOEMS (Micro-Opto-Electro-Mechanical Systems) [1]. Based on the type of detector, handheld NIR spectrometers can be classified into two categories: array-detector and single-detector instruments.…”
Section: Instrumentationmentioning
confidence: 99%
“…MEMS technology also facilitates the integration of multiple optical elements onto a single chip, leading to highly compact sensor designs. 2,3 Advanced Optics: Innovations in optical design have contributed to the development of compact spectral sensors with improved performance. For example, diffractive optics and holographic gratings enable efficient light dispersion and collection in miniature spectrometer designs.…”
Section: Introductionmentioning
confidence: 99%