MEMS Based Particle Size Analyzer Using Electrostatic Measuring Techniques

Lee, Sang-Myun.; Kim, Hong-Lae.; Kwon, Hong-Beom; Kim, Kyongtae; Yoo, Sun-Kook; Hong, Ui-Seon; Hwang, Jungho; Kim, Yong Jun

doi:10.1109/transducers.2019.8808773

Cited by 3 publications

(4 citation statements)

References 13 publications

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“…Instead of its inertia as in the case of impactors, differential mobility of charged particles in an electrostatic field is considered in the remainder, which can separate polydisperse particles into several size bins in the diameter range from 50 to 200 nm ( Table 1 ). This way, a more comprehensive characterization of air quality based on portable DMPS instruments was shown to be feasible [ 22 , 23 ]. Remaining drawbacks of the reported designs are supply voltages in the kV range needed for both a charging unit and the DMA, a micro pump for air-flow generation, and a sensitive electrometer for particle detection.…”

Section: Portable Gravimetric Aerosol Monitors With Particle-size Separationmentioning

confidence: 99%

“…Remaining drawbacks of the reported designs are supply voltages in the kV range needed for both a charging unit and the DMA, a micro pump for air-flow generation, and a sensitive electrometer for particle detection. Furthermore, these instruments are still rather bulky with DMA channel dimensions of 1 × 5 × 50 mm 3 [ 22 ] and a total weight of 1.0 kg (without battery) and 0.95 kg of standalone miniature UFP sizers, respectively [ 22 , 24 ].…”

Section: Portable Gravimetric Aerosol Monitors With Particle-size Separationmentioning

confidence: 99%

“…In the following paper, we first briefly review and evaluate in Section 2 a selection of recently reported portable gravimetric airborne particle sensors [ 12 , 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 ]. In Section 3 , we describe design, fabrication and test of a recently proposed highly sensitive MEMS-based NP sensor containing a µFC with an integrated PMC [ 26 , 27 ].…”

Section: Introductionmentioning

confidence: 99%

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Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel

Bertke

Kirsch

Uhde

et al. 2021

Sensors

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To monitor airborne nano-sized particles (NPs), a single-chip differential mobility particle sizer (DMPS) based on resonant micro cantilevers in defined micro-fluidic channels (µFCs) is introduced. A size bin of the positive-charged fraction of particles herein is separated from the air stream by aligning their trajectories onto the cantilever under the action of a perpendicular electrostatic field of variable strength. We use previously described µFCs and piezoresistive micro cantilevers (PMCs) of 16 ng mass fabricated using micro electro mechanical system (MEMS) technology, which offer a limit of detection of captured particle mass of 0.26 pg and a minimum detectable particulate mass concentration in air of 0.75 µg/m3. Mobility sizing in 4 bins of a nebulized carbon aerosol NPs is demonstrated based on finite element modelling (FEM) combined with a-priori knowledge of particle charge state. Good agreement of better than 14% of mass concentration is observed in a chamber test for the novel MEMS-DMPS vs. a simultaneously operated standard fast mobility particle sizer (FMPS) as reference instrument. Refreshing of polluted cantilevers is feasible without de-mounting the sensor chip from its package by multiply purging them alternately in acetone steam and clean air.

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Section: Portable Gravimetric Aerosol Monitors With Particle-size Separationmentioning

confidence: 99%

Section: Portable Gravimetric Aerosol Monitors With Particle-size Separationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel

Bertke

Kirsch

Uhde

et al. 2021

Sensors

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“…Therefore, it is essential to develop small portable measurement devices to monitor the personal PM level as Individuals move within microenvironments. Recently, Lee et al (2019) developed a small UFPs size analyzer using electrostatics techniques. Our study aims to further reduce the size of the PM measurement devices by using Acoustophoresis on lap-on-a-chip devices.…”

Section: Introductionmentioning

confidence: 99%

The use of acoustic streaming in Sub-micron particle sorting

Lai

Chan

et al. 2021

Aerosol Science and Technology

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The lack of personal particulate matter (PM) monitoring technique hinders the knowledge of the negative health impacts caused by inhaling PM. Acoustophoresis has a potential to produce miniature particle sorters that can be carried inside human's breath zone. Micron particles can be manipulated by Acoustic Radiation Force (ARF), but sub-micron particles can hardly be directed due to Acoustic Streaming Effect (ASE). The purpose of this study is to examine the feasibility of sorting sub-micron particles using ASE. In this study, a 2D numerical model is used to simulate the movement of sub-micron particles, ranging from 0.1µm to 0.9µm in diameter with 0.1µm step size, suspended in a microchannel. Since tiny particles circulate according to the streaming pattern, which depends on the geometry of the container, the effect of the microchannel's cross-sectional shape on particle movement is investigated, from rectangular to non-rectangular. Results found that sub-micron particles are characterized as either ARF-dominant or ASE-dominant. ARF-dominant particles stop at the pressure node and sidewalls, while ASE-dominant particles are trapped by the streaming flow inside a certain area defined by the particle size. Larger ASE-dominant particles move in a narrower region close to the sidewalls; smaller particles occupy a wider area. Since ASE-dominant particles can be directed outside the settling location of ARF-dominated particles, separating them can reach 98.9% purity in a non-rectangular microchannel. Most importantly, separating ASEdominant particles of different sizes is shown possible using a triangular microchannel. The findings imply that ASE can be the mechanism for sub-micron particle sorting.

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Resonant Silicon Microcantilevers for Particle and Gas Sensing

Xu,

Peiner

2023

Springer Series on Chemical Sensors and Biosensors

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MEMS Based Particle Size Analyzer Using Electrostatic Measuring Techniques

Cited by 3 publications

References 13 publications

Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel

Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel

The use of acoustic streaming in Sub-micron particle sorting

Resonant Silicon Microcantilevers for Particle and Gas Sensing

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