2011
DOI: 10.1117/12.884066
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MEMS-based uncooled THz detectors for staring imagers

Abstract: We review our previous work to develop an uncooled THz detector capable of achieving an NEΔT ~0.5K at 30Hz frame rate and describe our approach to develop a staring THz camera based on a 2D array of such detectors. Both predicted and measured results of performance metrics (responsivity, NEP, response time, spectral bandwidth, NEΔT) are presented. The measured performance agrees reasonably well with predictions and is consistent with attaining our NEΔT goal. Thus far, 1x4 detector arrays have been fabricated, … Show more

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Cited by 4 publications
(4 citation statements)
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“…Cox, J. A. et al [46] developed the spiral-antenna coupled thermo-electric (TE) devices (1x8 elements) which were sensitive to the spectral-frequency range from 0.2 to 2 THz. Realization of the antenna-coupled TE-FPA operating at frame rate of 30 Hz may bring the MDP value of ca.…”
Section: Comparison Of Performances For Different Detectorsmentioning
confidence: 99%
“…Cox, J. A. et al [46] developed the spiral-antenna coupled thermo-electric (TE) devices (1x8 elements) which were sensitive to the spectral-frequency range from 0.2 to 2 THz. Realization of the antenna-coupled TE-FPA operating at frame rate of 30 Hz may bring the MDP value of ca.…”
Section: Comparison Of Performances For Different Detectorsmentioning
confidence: 99%
“…Modern detection approaches involve metamaterials [5], microelectromechanical systems (MEMS) detectors [22], modulators based on graphene and other 2D semiconductors, as well as passive detection using traditional transistors (HBTs and HEMTs), with many new approaches demonstrated post-2010.…”
Section: Traditional and Current Approaches To Terahertz Radar Andmentioning
confidence: 99%
“…A particularly important area of research is security, for example for concealed weapon detection in locations such as airports and train terminals. The main benefit here arises once again from the wavelength of the electromagnetic waves: although radiation with a wavelength of 1 mm can easily penetrate materials of which clothes are made, it is reflected by explosives [12], weapons [22] and drugs [23]. In general, passive imagers must be able to provide 1 cm resolution at a target distance up to 10 m, which is best achieved at frequencies below 2 THz and even better, 1 THz.…”
Section: Introductionmentioning
confidence: 99%
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