MEMS capacitive humidity sensor with plate array structure using polyimide sensing layer

Vijapur, Pavankumar R; Karbari, Sudha R.; Shireesha, G.

doi:10.1109/ccube.2017.8394165

2017 International Conference on Circuits, Controls, and Communications (CCUBE) 2017

DOI: 10.1109/ccube.2017.8394165

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MEMS capacitive humidity sensor with plate array structure using polyimide sensing layer

Pavankumar R Vijapur¹,

Sudha R. Karbari²,

G. Shireesha³

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MEMS capacitive humidity sensor with plate array structure using polyimide sensing layer

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References 12 publications

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