MEMS micro-valve for space applications

Abstract

We report on the development of a Micro-Electro-Mechanical Systems (MEMS) valve that is designed to meet the rigorous performance requirements for a variety of space applications, such as micropropulsion, in-situ chemical analysis of other planets, or micro-fluidics experiments in micro-gravity. These systems often require very small yet reliable silicon valves with extremely low leak rates and long shelf lives. Also, they must survive the perils of space travel, which include unstoppable radiation, monumental shock and vibration forces, as well as extreme variations in temperature. Currently, no commercial MEMS valve meets these requirements. We at JPL are developing a piezoelectric MEMS valve that attempts to address the unique problem of space. We begin with proven configurations that may seem familiar. However, we have implemented some major design innovations that should produce a superior valve. The JPL micro-valve is expected to have an extremely low leak rate, limited susceptibility to particulates, vibration or radiation, as well as a wide operational temperature range.

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“…Conventional microvalves utilize magnetic [4], electrostatic [5,6], heat [7], mechanical [8] (spring), pneumatic [9], and piezoelectric [10] mechanisms to induce the motion of a membrane. Often, such microvalves are miniaturized versions of their conventional, macro counterparts and consist of actuating, moving, and sealing components.…”

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“…These future applications provide the basis for potential applications in biomimetic devices in mechanical nanosystems. [58][59][60] The forisome-based smart materials can also be developed to have application in health monitoring of structural integrity in civil infrastructure and for aerospace hardware. 56 Thus, forisomes are a class of protein complex which have unique properties that could be exploited in nanotechnological and biomimetics applications.…”

“…NASA has identified the development of new smart materials for application in micro valves as a key technology in future space exploration. 58 Micro valves have diversified applications which include -micro propulsion, miniature vacuum system, and micro instruments for in situ analysis, microbiology, and medicine in space. 58 The micro fluidic devices use an array of micro channels to mix, transport, and separate fluids in a specific order.…”

“…58 Micro valves have diversified applications which include -micro propulsion, miniature vacuum system, and micro instruments for in situ analysis, microbiology, and medicine in space. 58 The micro fluidic devices use an array of micro channels to mix, transport, and separate fluids in a specific order. Working at micro scale has very promising prospects like reduction in reagents required, power consumed, time, and cost.…”

“…Working at micro scale has very promising prospects like reduction in reagents required, power consumed, time, and cost. 58 Micro fluidics system has the potential advantage for space exploration missions as it reduces the requirement for resource and space. At the scale of micro fluidics system many characteristics like surface tension, fluid resistance, Reynolds's number that are unfavorable to work can be dealt with.…”