MEMS Resonator Parameter Estimation from Fast Frequency Sweeps

Abstract

In this paper, we introduce a new approach to the estimation of the parameters of high quality factor, low natural frequency resonators. Our approach is based on transient measurements of the slowly-varying amplitude and phase response of a resonator to an arbitrary nearly-periodic drive stimulus. We show how this approach may be employed for estimating the parameters of nonlinear resonators, with a parameter estimation procedure that does not rely on a closedform expression of the transient response, nor on an iterative algorithm (it results in a linear least squares problem), is simple to implement and is very amenable to integration. We illustrate our approach with simulations of fast frequency sweeps, highlight its benefits compared to steady-state response fitting, and study its robustness to measurement noise.